公开(公告)号：WO2009026126A3

公开(公告)日：2009-10-29

申请号：PCT/US2008073257

申请日：2008-08-15

Applicant: NDSU RES FOUNDATION ,  HOEY JUSTIN MICHAEL ,  AKHATOV ISKANDER S ,  SWENSON ORVEN FREDRICK ,  SCHULZ DOUGLAS LLOYD

Inventor： HOEY JUSTIN MICHAEL ,  AKHATOV ISKANDER S ,  SWENSON ORVEN FREDRICK ,  SCHULZ DOUGLAS LLOYD

IPC: B05B5/00 ,  B05B3/02 ,  B05B5/12

CPC classification number: H05K3/14 ,  H05K3/102 ,  H05K3/125 ,  H05K2201/0257 ,  H05K2203/013 ,  H05K2203/0285 ,  H05K2203/1344 ,  Y10T428/25

Abstract: A Convergent-Divergent-Convergent nozzle apparatus for direct-whte applications is described. The tip apparatus includes at least three nozzles concentrically positioned in series. In a non-limiting embodiment, a first nozzle has a converging taper, a second nozzle extends from the first nozzle with a diverging taper, and a third nozzle extends from the second nozzle and has a converging taper. The nozzles are positioned in series and are coaxial, and can be formed from either separate components or a monolithic structure. Such an arrangement has permitted direct writing of aerosolized particle streams in line widths from 3.7 - 8 µm in width prior to sintering. Further refinements to the apparatus and processing parameters may result in line widths of 1 µm or less. Aerosolized particles may comprise conductor or semiconductor precursors that may be processed into microelectronic conductors or semiconductors, respectively. The particles may also comprise nanostructures or nanoparticles.

Abstract translation: 描述了用于直接应用的收敛 - 发散 - 融合喷嘴装置。 尖端装置包括至少三个同心地定位成串联的喷嘴。 在非限制性实施例中，第一喷嘴具有会聚锥形，第二喷嘴从第一喷嘴延伸，具有发散锥形，第三喷嘴从第二喷嘴延伸并具有会聚锥形。 喷嘴是串联定位的并且是同轴的，并且可以由单独的部件或单块结构形成。 这种布置允许在烧结之前直线写入宽度为3.7-8μm的烟雾化颗粒流。 对设备和处理参数的进一步改进可能导致1μm或更小的线宽度。 气溶胶颗粒可以包括可以分别加工成微电子导体或半导体的导体或半导体前体。 颗粒还可以包含纳米结构或纳米颗粒。

公开(公告)号：WO2009026126A2

公开(公告)日：2009-02-26

申请号：PCT/US2008/073257

申请日：2008-08-15

Applicant: NDSU RESEARCH FOUNDATION ,  HOEY, Justin, Michael ,  AKHATOV, Iskander, S. ,  SWENSON, Orven, Fredrick ,  SCHULZ, Douglas, Lloyd

Inventor： HOEY, Justin, Michael ,  AKHATOV, Iskander, S. ,  SWENSON, Orven, Fredrick ,  SCHULZ, Douglas, Lloyd

CPC classification number: H05K3/14 ,  H05K3/102 ,  H05K3/125 ,  H05K2201/0257 ,  H05K2203/013 ,  H05K2203/0285 ,  H05K2203/1344 ,  Y10T428/25

Abstract: A Convergent-Divergent-Convergent nozzle apparatus for direct-whte applications is described. The tip apparatus includes at least three nozzles concentrically positioned in series. In a non-limiting embodiment, a first nozzle has a converging taper, a second nozzle extends from the first nozzle with a diverging taper, and a third nozzle extends from the second nozzle and has a converging taper. The nozzles are positioned in series and are coaxial, and can be formed from either separate components or a monolithic structure. Such an arrangement has permitted direct writing of aerosolized particle streams in line widths from 3.7 - 8 μm in width prior to sintering. Further refinements to the apparatus and processing parameters may result in line widths of 1 μm or less. Aerosolized particles may comprise conductor or semiconductor precursors that may be processed into microelectronic conductors or semiconductors, respectively. The particles may also comprise nanostructures or nanoparticles.

Abstract translation: 描述了用于直接应用的收敛 - 发散 - 收敛喷嘴装置。 尖端装置包括至少三个串联同心设置的喷嘴。 在一个非限制性实施例中，第一喷嘴具有会聚锥形，第二喷嘴从第一喷嘴以分叉锥形延伸，第三喷嘴从第二喷嘴延伸并具有会聚锥形。 喷嘴串联并且是同轴的，并且可以由单独的部件或单体结构形成。 这样的布置允许在烧结之前以宽度为3.7-8μm的线宽直接书写雾化粒子流。 装置和工艺参数的进一步改进可能导致1μm或更小的线宽。 雾化颗粒可以包括导体或半导体前体，其可以分别被加工成微电子导体或半导体。 颗粒还可以包含纳米结构或纳米颗粒。