Invention Application
- Patent Title: PHOTOVOLTAIC PRODUCTION LINE
- Patent Title (中): 光伏生产线
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Application No.: PCT/US2008/074931Application Date: 2008-08-29
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Publication No.: WO2009029902A1Publication Date: 2009-03-05
- Inventor: BACHRACH, Robert Z. , CHAE, Yong-Kee , CHOI, Soo Young , DE VRIES, Nicholas G. J. , ELGAR, Yacov , ENGLHARDT, Eric A. , FREI, Michel R. , GAY, Charles , HAWKINS, Parris , HO, Choi , HUNTER, James Craig , KANKANALA, Penchala N. , LI, Liwei , LO, Wing Hoo , LU, Danny Cam Toan , MEI, Fang , MURPHY, Stephen P. , PATEL, Srujal , SAUNDERS, Matthew J. B. , SCHLEZINGER, Asaf , SHENG, Shuran , SU, Tzay-Fa , SULLIVAN, Jeffrey S. , TANNER, David , TROWBRIDGE, Teresa , WALKER, Brice , WHITE, John M. , WON, Tae K.
- Applicant: APPLIED MATERIALS, INC. , BACHRACH, Robert Z. , CHAE, Yong-Kee , CHOI, Soo Young , DE VRIES, Nicholas G. J. , ELGAR, Yacov , ENGLHARDT, Eric A. , FREI, Michel R. , GAY, Charles , HAWKINS, Parris , HO, Choi , HUNTER, James Craig , KANKANALA, Penchala N. , LI, Liwei , LO, Wing Hoo , LU, Danny Cam Toan , MEI, Fang , MURPHY, Stephen P. , PATEL, Srujal , SAUNDERS, Matthew J. B. , SCHLEZINGER, Asaf , SHENG, Shuran , SU, Tzay-Fa , SULLIVAN, Jeffrey S. , TANNER, David , TROWBRIDGE, Teresa , WALKER, Brice , WHITE, John M. , WON, Tae K.
- Applicant Address: 3050 Bowers Avenue Santa Clara, California 95054 US
- Assignee: APPLIED MATERIALS, INC.,BACHRACH, Robert Z.,CHAE, Yong-Kee,CHOI, Soo Young,DE VRIES, Nicholas G. J.,ELGAR, Yacov,ENGLHARDT, Eric A.,FREI, Michel R.,GAY, Charles,HAWKINS, Parris,HO, Choi,HUNTER, James Craig,KANKANALA, Penchala N.,LI, Liwei,LO, Wing Hoo,LU, Danny Cam Toan,MEI, Fang,MURPHY, Stephen P.,PATEL, Srujal,SAUNDERS, Matthew J. B.,SCHLEZINGER, Asaf,SHENG, Shuran,SU, Tzay-Fa,SULLIVAN, Jeffrey S.,TANNER, David,TROWBRIDGE, Teresa,WALKER, Brice,WHITE, John M.,WON, Tae K.
- Current Assignee: APPLIED MATERIALS, INC.,BACHRACH, Robert Z.,CHAE, Yong-Kee,CHOI, Soo Young,DE VRIES, Nicholas G. J.,ELGAR, Yacov,ENGLHARDT, Eric A.,FREI, Michel R.,GAY, Charles,HAWKINS, Parris,HO, Choi,HUNTER, James Craig,KANKANALA, Penchala N.,LI, Liwei,LO, Wing Hoo,LU, Danny Cam Toan,MEI, Fang,MURPHY, Stephen P.,PATEL, Srujal,SAUNDERS, Matthew J. B.,SCHLEZINGER, Asaf,SHENG, Shuran,SU, Tzay-Fa,SULLIVAN, Jeffrey S.,TANNER, David,TROWBRIDGE, Teresa,WALKER, Brice,WHITE, John M.,WON, Tae K.
- Current Assignee Address: 3050 Bowers Avenue Santa Clara, California 95054 US
- Agency: PATTERSON, B. Todd et al.
- Priority: US60/967,077 20070831; US61/020,304 20080110; US61/023,214 20080124; US61/023,810 20080125; US61/023,739 20080125; US61/032,005 20080227; US61/034,931 20080307; US61/036,691 20080314; US61/043,060 20080407; US61/044,852 20080414
- Main IPC: G06F7/10
- IPC: G06F7/10 ; H01L31/06 ; H01L21/4763
Abstract:
The present invention relates to a system that can be used to form a photovoltaic device using processing modules that are adapted to perform steps in the solar cell formation process The automated solar cell fab is generally an arrangement of automated processing modules and automation equipment that is used to form solar cell devices. The automated solar fab will thus generally comprise a substrate receiving module that is adapted to receive a substrate, one or more absorbing layer deposition cluster tools having at least one processing chamber that is adapted to deposit a silicon-containing layer on a surface of the substrate, one or more back contact deposition chambers, one or more material removal chambers, a solar cell encapsulation device, an autoclave module, an automated junction box attaching module, and one or more quality assurance modules that are adapted to test and qualify the completely formed solar cell device.
Information query
