中科微点-全球专利检索

  1. Login
  2. Sign Up

Search Results

7 records (took 0.011 seconds)

    HIGH TEMPERATURE THIN FILM TRANSISTOR ON SODA LIME GLASS
    1.
    发明申请
    HIGH TEMPERATURE THIN FILM TRANSISTOR ON SODA LIME GLASS 审中-公开

    公开(公告)号：WO2010111286A3

    公开(公告)日：2010-09-30

    申请号：PCT/US2010/028341

    申请日：2010-03-23

    Applicant: APPLIED MATERIALS, INC. ,  YANG, Ya-Tang ,  PARK, Beom Soo ,  WON, Tae K. ,  CHOI, Soo Young

    Inventor： YANG, Ya-Tang ,  PARK, Beom Soo ,  WON, Tae K. ,  CHOI, Soo Young

    IPC: H01L29/786 ,  H01L21/205

    Abstract: The present invention generally comprises a low cost TFT and a method of manufacturing a TFT. For TFTs, soda lime glass would be an attractive alternative to non-alkali glass, but a soda lime glass substrate will permit sodium to diffuse into the active layer and degrade the performance of the TFT. Substrates comprising a polyimide, because they are flexible, would also be attractive to utilize instead of non-alkali glass substrates, but the plastic substrates permit carbon to diffuse into the active layer. By depositing a silicon oxynitride adhesion layer over the soda lime glass substrate and a silicon rich barrier layer over the adhesion layer, diffusion may be reduced and deposition may occur at high temperatures. Thus, a lower cost TFT may be produced with a soda lime glass substrate or a substrate comprising a polyimide as compared to a non-alkali glass substrate.

    HIGH TEMPERATURE THIN FILM TRANSISTOR ON SODA LIME GLASS
    4.
    发明申请
    HIGH TEMPERATURE THIN FILM TRANSISTOR ON SODA LIME GLASS 审中-公开
    SODA LIME玻璃上的高温薄膜晶体管

    公开(公告)号：WO2010111286A2

    公开(公告)日：2010-09-30

    申请号：PCT/US2010028341

    申请日：2010-03-23

    Applicant: APPLIED MATERIALS INC ,  YANG YA-TANG ,  PARK BEOM SOO ,  WON TAE K ,  CHOI SOO YOUNG

    Inventor： YANG YA-TANG ,  PARK BEOM SOO ,  WON TAE K ,  CHOI SOO YOUNG

    IPC: H01L29/786 ,  H01L21/205

    CPC classification number: H01L21/3145 ,  H01L21/3185 ,  H01L27/1248 ,  H01L29/518 ,  H01L29/66765 ,  H01L29/78603 ,  Y10T428/265

    Abstract: The present invention generally comprises a low cost TFT and a method of manufacturing a TFT. For TFTs, soda lime glass would be an attractive alternative to non-alkali glass, but a soda lime glass substrate will permit sodium to diffuse into the active layer and degrade the performance of the TFT. Substrates comprising a polyimide, because they are flexible, would also be attractive to utilize instead of non-alkali glass substrates, but the plastic substrates permit carbon to diffuse into the active layer. By depositing a silicon oxynitride adhesion layer over the soda lime glass substrate and a silicon rich barrier layer over the adhesion layer, diffusion may be reduced and deposition may occur at high temperatures. Thus, a lower cost TFT may be produced with a soda lime glass substrate or a substrate comprising a polyimide as compared to a non-alkali glass substrate.

    Abstract translation: 本发明通常包括低成本TFT和制造TFT的方法。 对于TFT，钠钙玻璃将成为非碱玻璃的有吸引力的替代品，但是钠钙玻璃基板将允许钠扩散到有源层并降低TFT的性能。 由于它们是柔性的，包含聚酰亚胺的基底也将是有吸引力的而不是使用无碱玻璃基底，但是塑料基底允许碳扩散到活性层中。 通过在钠钙玻璃基板上沉积氮氧化硅粘合层，并在粘附层上沉积富硅势垒层，可能会降低扩散，并在高温下会发生沉积。 因此，与无碱玻璃基板相比，可以用钠钙玻璃基板或包含聚酰亚胺的基板制造成本较低的TFT。

Patent Agency Ranking