Invention Application
WO2010011036A3 PHOTONIC CRYSTAL DEVICE PRODUCED BY A WET PROCESS, AND A PRODUCTION METHOD THEREOF
审中-公开
由湿法生产的光子晶体装置及其生产方法
- Patent Title: PHOTONIC CRYSTAL DEVICE PRODUCED BY A WET PROCESS, AND A PRODUCTION METHOD THEREOF
- Patent Title (中): 由湿法生产的光子晶体装置及其生产方法
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Application No.: PCT/KR2009003703Application Date: 2009-07-07
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Publication No.: WO2010011036A3Publication Date: 2010-04-15
- Inventor: KIM JUNG-IL , JEON SEOK-GY , JIN YUN-SIK , KIM GEUN-JU , SON CHAE-HWA , PARK SI-HYUN , HAN SEONG TAE , KIM JONG UK
- Applicant: KOREA ELECTRO TECH RES INST , KIM JUNG-IL , JEON SEOK-GY , JIN YUN-SIK , KIM GEUN-JU , SON CHAE-HWA , PARK SI-HYUN , HAN SEONG TAE , KIM JONG UK
- Assignee: KOREA ELECTRO TECH RES INST,KIM JUNG-IL,JEON SEOK-GY,JIN YUN-SIK,KIM GEUN-JU,SON CHAE-HWA,PARK SI-HYUN,HAN SEONG TAE,KIM JONG UK
- Current Assignee: KOREA ELECTRO TECH RES INST,KIM JUNG-IL,JEON SEOK-GY,JIN YUN-SIK,KIM GEUN-JU,SON CHAE-HWA,PARK SI-HYUN,HAN SEONG TAE,KIM JONG UK
- Priority: KR20080071466 2008-07-23; KR20080135332 2008-12-29
- Main IPC: H01L21/306
- IPC: H01L21/306 ; H01L21/20 ; H01L21/3063
Abstract:
The present invention relates to a method for producing a photonic crystal device having a photonic crystal structure which can be used in photonic crystal devices such as optical waveguides, resonators, filters, antennas and Smith-Purcell free electron lasers which can be employed in a desired electromagnetic waveband by application of semiconductor processing technology and of an anisotropic wet process which uses the crystallization direction (100) of a silicon wafer; for producing a photonic crystal device which comprises a photonic crystal part having a periodic array of silicon crystals having a predetermined form and a covering part for reducing optical losses in the axial direction to be used as an optical waveguide or a resonator, thereby to be capable of being applied in a desired electromagnetic band; and which can have the conductive photonic-crystal characteristics by not coating the silicon crystal with an electrically conductive material and the metal photonic-crystal characteristics by coating the silicon crystal with an electrically conductive material. This production method makes it possible to mass-produce photonic crystal structures of relatively low cost and substantial height within a short time.
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