Invention Application
- Patent Title: MEMS DEVICE WITH LEAKAGE PATH
- Patent Title (中): 具有泄漏路径的MEMS器件
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Application No.: PCT/GB2010050241Application Date: 2010-02-12
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Publication No.: WO2010092406A3Publication Date: 2011-05-26
- Inventor: JENKINS COLIN ROBERT , HOEKSTRA TSJERK HANS , LAMING RICHARD IAN
- Applicant: WOLFSON MICROELECTRONICS PLC , JENKINS COLIN ROBERT , HOEKSTRA TSJERK HANS , LAMING RICHARD IAN
- Assignee: WOLFSON MICROELECTRONICS PLC,JENKINS COLIN ROBERT,HOEKSTRA TSJERK HANS,LAMING RICHARD IAN
- Current Assignee: WOLFSON MICROELECTRONICS PLC,JENKINS COLIN ROBERT,HOEKSTRA TSJERK HANS,LAMING RICHARD IAN
- Priority: GB0902480 2009-02-13
- Main IPC: B81B3/00
- IPC: B81B3/00
Abstract:
A micro-electrical-mechanical system (MEMS) transducer comprises a layer of dielectric material having an electrode formed in the layer of dielectric material.A region of the layer of the dielectric material is adapted to provide a leakage path which, in use, removes unwanted charge from the layer of dielectric material.
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