Invention Application
- Patent Title: CARBON NANOTUBE CONTACT STRUCTURES FOR USE WITH SEMICONDUCTOR DIES AND OTHER ELECTRONIC DEVICES
-
Application No.: PCT/US2010/029877Application Date: 2010-04-03
-
Publication No.: WO2010115171A3Publication Date: 2010-10-07
- Inventor: GRITTERS, John K. , MARTENS, Rodney, I. , YAGLIOGLU, Onnik
- Applicant: FORMFACTOR, INC. , GRITTERS, John K. , MARTENS, Rodney, I. , YAGLIOGLU, Onnik
- Applicant Address: 7005 Southfront Road Livermore, California 94551 US
- Assignee: FORMFACTOR, INC.,GRITTERS, John K.,MARTENS, Rodney, I.,YAGLIOGLU, Onnik
- Current Assignee: FORMFACTOR, INC.,GRITTERS, John K.,MARTENS, Rodney, I.,YAGLIOGLU, Onnik
- Current Assignee Address: 7005 Southfront Road Livermore, California 94551 US
- Agency: HAUSER, Robert Scott et al.
- Priority: US12/418,368 20090403
- Main IPC: H01L21/60
- IPC: H01L21/60 ; B82B3/00
Abstract:
A method of making carbon nanotube contact structures on an electronic device includes growing a plurality of carbon nanotube columns on a mandrel. Electrically-conductive adhesive is applied to ends of the columns distal from the mandrel, and the columns are transferred to the electronic device. An electrically-conductive material is deposited onto some or all of the columns. The mandrel can be reused to grow a second plurality of carbon nanotube columns.
Information query
IPC分类:
