Invention Application
- Patent Title: CLAMPING AND CONTACTING DEVICE FOR THIN SILICON RODS
- Patent Title (中): 用于薄硅棒的夹紧和接触装置
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Application No.: PCT/EP2010/001985Application Date: 2010-03-29
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Publication No.: WO2010115542A1Publication Date: 2010-10-14
- Inventor: STUBHAN, Frank , LECK, Michael
- Applicant: CENTROTHERM SITEC GMBH , STUBHAN, Frank , LECK, Michael
- Applicant Address: Johannes-Schmid-Str. 8 89143 Blaubeuren DE
- Assignee: CENTROTHERM SITEC GMBH,STUBHAN, Frank,LECK, Michael
- Current Assignee: CENTROTHERM SITEC GMBH,STUBHAN, Frank,LECK, Michael
- Current Assignee Address: Johannes-Schmid-Str. 8 89143 Blaubeuren DE
- Agency: KLANG, Alexander, H.
- Priority: DE20 20090331; DE20 20100218
- Main IPC: C01B33/02
- IPC: C01B33/02
Abstract:
A clamping and contacting device for mounting and electrically contacting thin silicon rods in silicon deposition reactors is disclosed, the clamping and contacting device having a rod holder for receiving one end of a thin silicon rod. The rod holder comprises at least three contact elements disposed around a receiving space for the thin silicon rod. Each of the contact elements forms a contact surface facing towards a receiving space for electrically and mechanically contacts the thin silicon rod, wherein the contact surfaces of adjacent contact elements are spaced apart.
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