Invention Application
WO2010146498A1 TILTED GRATINGS AND METHOD FOR PRODUCTION OF TILTED GRATINGS 审中-公开
倾斜砂浆和生产倾斜砂浆的方法

TILTED GRATINGS AND METHOD FOR PRODUCTION OF TILTED GRATINGS
Abstract:
The present invention relates to phase-contrast imaging which visualizes the phase information of coherent radiation passing a scanned object. Focused gratings are used which reduce the creation of trapezoid profile in a projection with a particular angle to the optical axis. A laser supported method is used in combination with a dedicating etching process for creating such focused grating structures.
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