Invention Application
WO2011062357A3 SHOWER HEAD ASSEMBLY AND THIN FILM DEPOSITION APPARATUS COMPRISING SAME
审中-公开
包括相同的喷头组件和薄膜沉积装置
- Patent Title: SHOWER HEAD ASSEMBLY AND THIN FILM DEPOSITION APPARATUS COMPRISING SAME
- Patent Title (中): 包括相同的喷头组件和薄膜沉积装置
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Application No.: PCT/KR2010006206Application Date: 2010-09-13
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Publication No.: WO2011062357A3Publication Date: 2011-07-14
- Inventor: HAN CHANG-HEE , RYU DONG-HO , LEE KI-HOON
- Applicant: IPS LTD , HAN CHANG-HEE , RYU DONG-HO , LEE KI-HOON
- Assignee: IPS LTD,HAN CHANG-HEE,RYU DONG-HO,LEE KI-HOON
- Current Assignee: IPS LTD,HAN CHANG-HEE,RYU DONG-HO,LEE KI-HOON
- Priority: KR20090111629 2009-11-18
- Main IPC: H01L21/205
- IPC: H01L21/205
Abstract:
The present invention relates to a shower head assembly, which can implement both atomic layer deposition and chemical vapor deposition, and to a thin film deposition apparatus comprising the shower head assembly. According to the present invention, both atomic layer deposition and chemical vapor deposition can be implemented using a single device, the economic feasibility and efficiency of the device are improved, and particles are prevented from accumulating within the device.
Information query
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