Abstract:
Provided is a thin film vapor deposition method capable of vapor depositing a thin film with increased productivity over a conventional ALD or cyclic CVD. According to the present invention, the thin film vapor deposition method uses a thin film vapor deposition apparatus comprising: a substrate support portion comprising a plurality of substrate mounting portions for mounting substrates and provided inside a reactor; and a gas spraying portion for supplying one or more types of gases to the substrate support portion, provided at the upper portion of the substrate support portion. The thin film vapor deposition method comprises the following steps: (a) mounting a plurality of substrates on the substrate support portion; (b) supplying a raw material gas and a reaction gas to be reacted with the raw material gas on the substrate support portion through the gas spraying portion while relatively rotating the substrate support portion and the gas spraying portion to vapor deposit a thin film on the substrates; (c) supplying an inert gas on the substrate support portion through the gas spraying portion while relatively rotating the substrate support portion and the gas spraying portion, for purging; and (d) supplying a post-treatment gas on the substrate support portion through the gas spraying portion while relatively rotating the substrate support portion and the gas spraying portion, for post-treatment.
Abstract:
The present invention relates to a compound having HIF-1 inhibition activity, to a method for preparing same, and to a pharmaceutical composition containing same as an active ingredient. The compound of the present invention exhibits anticancer activity by inhibiting the activity of HIF-1, which is a transcription factor that plays a significant role in cancer cell growth and metastasis, and does not indicate non-selective, cytotoxic anti-tumour activity. Accordingly, the compound or a pharmaceutically acceptable salt thereof according to the present invention inhibits HIF-1 activity, and therefore can be used as a therapeutic agent for solid tumours such as colon cancer, liver cancer, stomach cancer and breast cancer. In addition, the compound or the pharmaceutically acceptable salt thereof according to the present invention can be used as an active ingredient for a therapeutic agent for diabetic retinopathy or arthritis which may become worse when hypoxia-induced VEGF expression by HIF-1 increases.
Abstract:
The present invention relates to a pharmaceutical composition for suppressing dendritic cell maturation comprising glabridin or glabridin derivatives as an active ingredient. Glabridin not only suppresses dendritic cell maturation but also suppresses T-lymphocyte activation. Therefore, glabridin or its derivatives can be an active ingredient for a pharmaceutical composition for suppressing dendritic cell maturation, for a composition for immune regulation and for a composition for preventing and treating auto-immune disease, and can be effectively used for the treatment of auto-immune disease.
Abstract:
The present invention relates to a semiconductor manufacturing device, which can be applied in a semiconductor metal interconnection process, and a manufacturing method thereof. The semiconductor manufacturing device includes a loadlock chamber, at least one process chamber, a transfer chamber, and an oxidation preventing gas supply unit. The process chamber processes an annealing process by receiving a substrate. The transfer chamber transfers the substrate between the loadlock chamber and the process chamber. The oxidation preventing gas supply unit supplies oxidation preventing gas into either the transfer chamber or the loadlock chamber.
Abstract:
The present invention relates to a method for providing a game service in a cloud computing environment, to a cloud computing server, and to a cloud computing system. The cloud computing server is characterized by comprising a game server for executing at least one game, and a streaming server which captures audio-video (AV) data of at least one game executed, encodes the captured AV data, and streams the encoded AV data to at least one user terminal.
Abstract:
The present invention relates to a system and method for managing investment money. According to the present invention, a plurality of modules are systematically connected and disposed in a communication pipeline of an IM (investment money) management backbone server. Thus, when a situation occurs in which IM rebalancing is required, the system and method of the present invention involve inducing a plurality of units which are owned by a customer to be tightly connected together like a mesh so as to form an IM rebalancing network. The system and method of the present invention enable a customer or IM management company to simplify and diversify an IP rebalancing network or IP portfolio in various patterns, thereby effectively increasing economic profits.
Abstract:
The present invention relates to a composition for preventing and treating obesity containing highly water-soluble ß-cyclodextrin derivatives as an active ingredient. More specifically, the composition containing highly water-soluble ß-cyclodextrin derivatives, particularly 2-hydroxypropyl-ß-cyclodextrin (HP-ß-CD, HPBCD), inhibits the weight increase induced by a high fat diet, inhibits appetite through the decrease of food intake, reduces body fat, reduces the weight of a liver, and remarkably inhibits the rapid increase of blood glucose induced by the intake of glucose and maltose on an empty stomach, thereby enabling helpful use for preventing and treating obesity, preventing and treating various diseases induced by obesity and inhibiting the rapid increase of blood sugar after meals.
Abstract:
Disclosed herein is a method and apparatus for manufacturing a semiconductor, suitable for use in the formation of an amorphous carbon anti-reflective film having high selectivity by increasing etching resistance while an extinction coefficient associated with anti-reflectivity is maintained low. The method of manufacturing a semiconductor for the formation of an amorphous carbon anti-reflective film according to this invention includes (a) depositing an amorphous organic carbon film on the bottom film of a substrate; and (b) adding a compound containing nitrogen (N), fluorine (F) or silicon (Si) to the surface or the inner portion of the amorphous organic carbon film, to deposit a thin film of a-C:N, a-C:F or a-C:Si, having high selectivity, to a thickness from ones to tens of nm using an atomic layer deposition process. Therefore, an ultra-thin film having etching resistance is formed on or in the amorphous carbon anti-reflective film and the density and compressive stress of the amorphous carbon anti-reflective film are increased, thus increasing etching selectivity.
Abstract:
The present invention relates to novel use of prodigiosin for the treatment of Rheumatic arthritis and can provide excellent treatment effect to Rheumatic arthritis by treating composition including prodigiosin isolated from Serratia marcescence as an active principle to DBA-1 mouse of collagen-induced Rheumatic arthritis animal model and thereby inhibiting production of internal cytokine which is a important pathogen of Rheumatic arthritis.
Abstract:
The present invention relates to a shower head assembly, which can implement both atomic layer deposition and chemical vapor deposition, and to a thin film deposition apparatus comprising the shower head assembly. According to the present invention, both atomic layer deposition and chemical vapor deposition can be implemented using a single device, the economic feasibility and efficiency of the device are improved, and particles are prevented from accumulating within the device.