Invention Application
- Patent Title: CYLINDRICAL MAGNETIC LEVITATION STAGE AND LITHOGRAPHY
- Patent Title (中): 圆柱磁浮动阶段和平移
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Application No.: PCT/KR2010007464Application Date: 2010-10-28
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Publication No.: WO2011074775A3Publication Date: 2011-10-20
- Inventor: JEON JEONG WOO , OH HYUN SEOK , CARAIANI MITICA , CHUNG SUNG IL , KIM HYEON TAEG , LEE CHANG RIN , KIM JONG MOON
- Applicant: KOREA ELECTRO TECH RES INST , JEON JEONG WOO , OH HYUN SEOK , CARAIANI MITICA , CHUNG SUNG IL , KIM HYEON TAEG , LEE CHANG RIN , KIM JONG MOON
- Assignee: KOREA ELECTRO TECH RES INST,JEON JEONG WOO,OH HYUN SEOK,CARAIANI MITICA,CHUNG SUNG IL,KIM HYEON TAEG,LEE CHANG RIN,KIM JONG MOON
- Current Assignee: KOREA ELECTRO TECH RES INST,JEON JEONG WOO,OH HYUN SEOK,CARAIANI MITICA,CHUNG SUNG IL,KIM HYEON TAEG,LEE CHANG RIN,KIM JONG MOON
- Priority: KR20090124537 2009-12-15
- Main IPC: H01L21/68
- IPC: H01L21/68 ; G03F7/20 ; H01L21/027
Abstract:
The present invention provides a cylindrical magnetic levitation stage and an exposure apparatus, which can form a nanoscale pattern of a large area directly on the surface of a large cylinder. The present invention provides an exposure apparatus including a new type of cylindrical magnetic levitation stage, which can levitate, rotate, and move a cylinder in the axial direction by the principle of magnetic levitation in a non-contact manner and form a nanoscale pattern on the surface of the cylinder, and a light source for irradiating light on the surface of the cylinder, thereby reducing the position error of the cylindrical magnetic levitation stage to a nanoscale size and correcting the error caused by mechanical processing in real time. Moreover, the present invention provides an exposure apparatus, which includes a differential vacuum means combined with the cylindrical magnetic levitation stage to create a partial vacuum environment between the light source and the surface of the cylinder, and thus it is possible to employ light sources such as X-rays, electron beams, extreme ultraviolet (EUV) rays, etc.
Information query
IPC分类: