Invention Application
WO2011084427A3 METHODS AND SYSTEMS FOR PRODUCING SILICON, E.G., POLYSILICON, INCLUDING RECYCLING BYPRODUCTS 审中-公开
用于生产硅,大肠杆菌,多硅氧烷,包括再生副产品的方法和系统

METHODS AND SYSTEMS FOR PRODUCING SILICON, E.G., POLYSILICON, INCLUDING RECYCLING BYPRODUCTS
Abstract:
Systems and processes are provided for efficient, cost-effective production of silicon by chemical vapor deposition. Reaction byproducts are recycled for use within the systems and processes without recovery and external processing of the byproducts. The systems and processes provide savings in both capital and operating costs.
Patent Agency Ranking
0/0