Invention Application
WO2011143527A2 PROCESS KIT SHIELD FOR IMPROVED PARTICLE REDUCTION 审中-公开
用于改善颗粒减少的工艺套件

PROCESS KIT SHIELD FOR IMPROVED PARTICLE REDUCTION
Abstract:
Apparatus for improved particle reduction are provided herein. In some embodiments, an apparatus may include a process kit shield comprising a one-piece metal body having an upper portion and a lower portion and having an opening disposed through the one-piece metal body, wherein the upper portion includes an opening-facing surface configured to be disposed about and spaced apart from a target of a physical vapor deposition chamber and wherein the opening-facing surface is configured to limit particle deposition on an upper surface of the upper portion of the one-piece metal body during sputtering of a target material from the target of the physical vapor deposition chamber.
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