Invention Application
- Patent Title: PROCESS KIT SHIELD FOR IMPROVED PARTICLE REDUCTION
- Patent Title (中): 用于改善颗粒减少的工艺套件
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Application No.: PCT/US2011036395Application Date: 2011-05-13
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Publication No.: WO2011143527A2Publication Date: 2011-11-17
- Inventor: RASHEED MUHAMMAD , WANG RONGJUN , LIU ZHENDONG , FU XINYU , TANG XIANMIN
- Applicant: APPLIED MATERIALS INC , RASHEED MUHAMMAD , WANG RONGJUN , LIU ZHENDONG , FU XINYU , TANG XIANMIN
- Assignee: APPLIED MATERIALS INC,RASHEED MUHAMMAD,WANG RONGJUN,LIU ZHENDONG,FU XINYU,TANG XIANMIN
- Current Assignee: APPLIED MATERIALS INC,RASHEED MUHAMMAD,WANG RONGJUN,LIU ZHENDONG,FU XINYU,TANG XIANMIN
- Priority: US41705010 2010-11-24; US33485810 2010-05-14
- Main IPC: C23C14/34
- IPC: C23C14/34 ; C23C14/06
Abstract:
Apparatus for improved particle reduction are provided herein. In some embodiments, an apparatus may include a process kit shield comprising a one-piece metal body having an upper portion and a lower portion and having an opening disposed through the one-piece metal body, wherein the upper portion includes an opening-facing surface configured to be disposed about and spaced apart from a target of a physical vapor deposition chamber and wherein the opening-facing surface is configured to limit particle deposition on an upper surface of the upper portion of the one-piece metal body during sputtering of a target material from the target of the physical vapor deposition chamber.
Information query
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