Invention Application
WO2011156484A3 LOW-TEMPERATURE SYNTHESIS OF SILICA 审中-公开
二氧化硅的低温合成

LOW-TEMPERATURE SYNTHESIS OF SILICA
Abstract:
An ambient pressure Atomic Layer Deposition (ALD) technique to grow uniform silica layers onto organic substrates at low temperatures, including room temperature, is described. For example, tetramethoxysilane vapor is used alternately with ammonia vapor as a catalyst in an ambient environment.
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