Invention Application
- Patent Title: PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE AND DESIGN STRUCTURES
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Application No.: PCT/US2011/039560Application Date: 2011-06-08
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Publication No.: WO2011162949A3Publication Date: 2011-12-29
- Inventor: DANG, Dinh , DOAN, Thai , DUNBAR, George, A. , HE, Zhong-xiang , HERRIN, Russell, T. , JAHNES, Christopher, V. , MALING, Jeffrey, C. , MURPHY, William, J. , STAMPER, Anthony, K. , TWOMBLY, John, G. , WHITE, Eric, J.
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION , DANG, Dinh , DOAN, Thai , DUNBAR, George, A. , HE, Zhong-xiang , HERRIN, Russell, T. , JAHNES, Christopher, V. , MALING, Jeffrey, C. , MURPHY, William, J. , STAMPER, Anthony, K. , TWOMBLY, John, G. , WHITE, Eric, J.
- Applicant Address: New Orchard Road Armonk, NY 10504 US
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION,DANG, Dinh,DOAN, Thai,DUNBAR, George, A.,HE, Zhong-xiang,HERRIN, Russell, T.,JAHNES, Christopher, V.,MALING, Jeffrey, C.,MURPHY, William, J.,STAMPER, Anthony, K.,TWOMBLY, John, G.,WHITE, Eric, J.
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION,DANG, Dinh,DOAN, Thai,DUNBAR, George, A.,HE, Zhong-xiang,HERRIN, Russell, T.,JAHNES, Christopher, V.,MALING, Jeffrey, C.,MURPHY, William, J.,STAMPER, Anthony, K.,TWOMBLY, John, G.,WHITE, Eric, J.
- Current Assignee Address: New Orchard Road Armonk, NY 10504 US
- Agency: CANALE, Anthony, J.
- Priority: US61/358,621 20100625
- Main IPC: B81B3/00
- IPC: B81B3/00 ; B81C1/00 ; H01H59/00
Abstract:
Planar cavity Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structure are provided. The method includes forming at least one Micro-Electro-Mechanical System (MEMS) cavity (60a, 60b) having a planar surface using a reverse damascene process.
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