Invention Application
- Patent Title: ETCHING SOLUTION FOR COPPER OR COPPER ALLOY
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Application No.: PCT/US2011047927Application Date: 2011-08-16
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Publication No.: WO2012024300A2Publication Date: 2012-02-23
- Inventor: YOSHIDA YUTAKA , KOJI YUKICHI
- Applicant: ADVANCED TECH MATERIALS , YOSHIDA YUTAKA , KOJI YUKICHI
- Assignee: ADVANCED TECH MATERIALS,YOSHIDA YUTAKA,KOJI YUKICHI
- Current Assignee: ADVANCED TECH MATERIALS,YOSHIDA YUTAKA,KOJI YUKICHI
- Priority: JP2011175477 2011-08-11; JP2010181485 2010-08-16
- Main IPC: C23F1/18
- IPC: C23F1/18 ; C23F1/02
Abstract:
A solution for selectively etching copper or a copper alloy from a microelectronic device, wherein the device simultaneously includes copper or a copper alloy and nickel-containing material, the solution being an etching solution for copper or a copper alloy comprising a chelating agent having an acid group in a molecule, hydrogen peroxide, and a surfactant having an oxyethylene chain in a molecule.
Public/Granted literature
- WO2012024300A3 ETCHING SOLUTION FOR COPPER OR COPPER ALLOY Public/Granted day:2012-05-31
Information query
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