Invention Application
- Patent Title: CRYOPUMP WITH CONTROLLED HYDROGEN GAS RELEASE
- Patent Title (中): 控制氢气排放的CRYOPUMP
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Application No.: PCT/US2011/062098Application Date: 2011-11-23
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Publication No.: WO2012071540A2Publication Date: 2012-05-31
- Inventor: EACOBACCI, Michael, J. , BARTLETT, Allen, J. , CASELLO, John, J. , WELLS, Jeffrey, A.
- Applicant: BROOKS AUTOMATION, INC. , EACOBACCI, Michael, J. , BARTLETT, Allen, J. , CASELLO, John, J. , WELLS, Jeffrey, A.
- Applicant Address: 15 Elizabeth Drive, Building 11 Chelmsford, MA 01824 US
- Assignee: BROOKS AUTOMATION, INC.,EACOBACCI, Michael, J.,BARTLETT, Allen, J.,CASELLO, John, J.,WELLS, Jeffrey, A.
- Current Assignee: BROOKS AUTOMATION, INC.,EACOBACCI, Michael, J.,BARTLETT, Allen, J.,CASELLO, John, J.,WELLS, Jeffrey, A.
- Current Assignee Address: 15 Elizabeth Drive, Building 11 Chelmsford, MA 01824 US
- Agency: SMITH, James, M. et al.
- Priority: US61/458,563 20101124
- Main IPC: F04B37/08
- IPC: F04B37/08
Abstract:
A cryopump system includes a cryopump having a first cooling stage and a second cooling stage connected to the first cooling stage, the second cooling stage including a gas adsorber having a hydrogen adsorbing capacity of at least about 2 standard liters. The thermal storage capacity of the second cooling stage is sufficient to enable control of hydrogen pressure within the cryopump to satisfy ignition safety limits and limits on hydrogen flow rate in an exhaust line to be within limits of an abatement system to be coupled to the cryopump, upon warming of the second cooling stage during regeneration of up to a fully loaded cryopump.
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