-
公开(公告)号：WO2012071540A3
公开(公告)日：2012-07-19
申请号：PCT/US2011062098
申请日：2011-11-23
Applicant: BROOKS AUTOMATION INC , EACOBACCI MICHAEL J , BARTLETT ALLEN J , CASELLO JOHN J , WELLS JEFFREY A
Inventor： EACOBACCI MICHAEL J , BARTLETT ALLEN J , CASELLO JOHN J , WELLS JEFFREY A
Abstract: A cryopump system includes a cryopump having a first cooling stage and a second cooling stage connected to the first cooling stage, the second cooling stage including a gas adsorber having a hydrogen adsorbing capacity of at least about 2 standard liters. The thermal storage capacity of the second cooling stage is sufficient to enable control of hydrogen pressure within the cryopump to satisfy ignition safety limits and limits on hydrogen flow rate in an exhaust line to be within limits of an abatement system to be coupled to the cryopump, upon warming of the second cooling stage during regeneration of up to a fully loaded cryopump.
Abstract translation: 一种低温泵系统包括具有第一冷却阶段和连接到第一冷却阶段的第二冷却阶段的低温泵，第二冷却阶段包括具有至少约2标准升的氢气吸附能力的气体吸附器。 第二冷却阶段的热存储容量足以实现低温泵内的氢气压力的控制以满足点火安全限制并且排气管线中的氢气流量限制在与低温泵连接的减排系统的限制内， 在第二冷却阶段升温期间再生至满负荷低温泵。
-
公开(公告)号：WO2012109304A2
公开(公告)日：2012-08-16
申请号：PCT/US2012024243
申请日：2012-02-08
Applicant: BROOKS AUTOMATION INC , SYSSOEV SERGEI , BARTLETT ALLEN J , CASELLO JOHN J , WELLS JEFFREY A , EACOBACCI MICAHEL J
Inventor： SYSSOEV SERGEI , BARTLETT ALLEN J , CASELLO JOHN J , WELLS JEFFREY A , EACOBACCI MICAHEL J
IPC: F04B37/08
CPC classification number: F04B37/08 , B01D8/00 , Y10T29/49236
Abstract: A cryopump has a simple-to-manufacture frontal baffle plate with improved gas distribution and has a large-area second-stage array plate to capture Type II gases. The cryopump has a first-stage frontal baffle plate having orifices and flaps bent from and attached to the orifices. The cryopump has a second-stage top plate that is larger in area than cooling baffles of the second stage array.
Abstract translation: 低温泵具有易于制造的具有改进的气体分布的前部挡板和具有用于捕获II型气体的大面积第二级阵列板。 低温泵具有第一级正面挡板，该第一级正面挡板具有从孔口弯曲并连接到孔口的孔口和翼片。 低温泵具有面积大于第二级阵列的冷却挡板的第二级顶板。
-
公开(公告)号：WO2012071540A2
公开(公告)日：2012-05-31
申请号：PCT/US2011/062098
申请日：2011-11-23
Applicant: BROOKS AUTOMATION, INC. , EACOBACCI, Michael, J. , BARTLETT, Allen, J. , CASELLO, John, J. , WELLS, Jeffrey, A.
Inventor： EACOBACCI, Michael, J. , BARTLETT, Allen, J. , CASELLO, John, J. , WELLS, Jeffrey, A.
IPC: F04B37/08
Abstract: A cryopump system includes a cryopump having a first cooling stage and a second cooling stage connected to the first cooling stage, the second cooling stage including a gas adsorber having a hydrogen adsorbing capacity of at least about 2 standard liters. The thermal storage capacity of the second cooling stage is sufficient to enable control of hydrogen pressure within the cryopump to satisfy ignition safety limits and limits on hydrogen flow rate in an exhaust line to be within limits of an abatement system to be coupled to the cryopump, upon warming of the second cooling stage during regeneration of up to a fully loaded cryopump.
Abstract translation: 低温泵系统包括具有第一冷却级的冷冻泵和连接到第一冷却级的第二冷却级，第二冷却级包括具有至少约2标准升的氢吸附能力的气体吸附器。 第二冷却阶段的蓄热能力足以使得能够控制低温泵内的氢气压力，以满足排气管线中的点火安全限制和氢气流量的限制，使之在与低温泵连接的减排系统的限度内， 在再次达到完全负载的低温泵的第二冷却阶段变暖。
-
公开(公告)号：WO2012109304A3
公开(公告)日：2012-08-16
申请号：PCT/US2012/024243
申请日：2012-02-08
Applicant: BROOKS AUTOMATION, INC. , SYSSOEV, Sergei , BARTLETT, Allen, J. , CASELLO, John, J. , WELLS, Jeffrey, A. , EACOBACCI, Micahel, J.
Inventor： SYSSOEV, Sergei , BARTLETT, Allen, J. , CASELLO, John, J. , WELLS, Jeffrey, A. , EACOBACCI, Micahel, J.
IPC: F04B37/08
Abstract: A cryopump has a simple-to-manufacture frontal baffle plate with improved gas distribution and has a large-area second-stage array plate to capture Type II gases. The cryopump has a first-stage frontal baffle plate having orifices and flaps bent from and attached to the orifices. The cryopump has a second-stage top plate that is larger in area than cooling baffles of the second stage array.
-
-
-
Search Results
4
records
(took 0.012 seconds)
