Invention Application
- Patent Title: SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING THE SAME
- Patent Title (中): 半导体结构及其形成方法
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Application No.: PCT/CN2011/077934Application Date: 2011-08-02
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Publication No.: WO2012155392A1Publication Date: 2012-11-22
- Inventor: ZHAO, Mei , LIANG, Renrong , WANG, Jing , XU, Jun
- Applicant: TSINGHUA UNIVERSITY , ZHAO, Mei , LIANG, Renrong , WANG, Jing , XU, Jun
- Applicant Address: Qinghuayuan, Haidian District Beijing 100084 CN
- Assignee: TSINGHUA UNIVERSITY,ZHAO, Mei,LIANG, Renrong,WANG, Jing,XU, Jun
- Current Assignee: TSINGHUA UNIVERSITY,ZHAO, Mei,LIANG, Renrong,WANG, Jing,XU, Jun
- Current Assignee Address: Qinghuayuan, Haidian District Beijing 100084 CN
- Agency: TSINGYIHUA INTELLECTUAL PROPERTY LLC
- Priority: CN201110125778.1 20110516; CN201110126554.2 20110516
- Main IPC: H01L29/51
- IPC: H01L29/51 ; H01L29/78 ; H01L21/28 ; H01L21/265 ; H01L21/8238
Abstract:
A semiconductor structure is provided. The semiconductor structure comprises: a substrate (1); a gate dielectric layer (20) formed on the substrate; a metal gate electrode layer (30) formed on the gate dielectric layer (20); and at least one metal-containing adjusting layer (43) for adjusting a work function of the semiconductor structure, in which an interfacial layer (10) is formed between the substrate (1) and the gate dielectric layer (20), and an energy of bond between a metal atom in the metal-containing adjusting layer (43) and an oxygen atom is larger than that between an atom of materials forming the gate dielectric layer (20) or the interfacial layer (10) and an oxygen atom. Further, a method for forming the semiconductor structure is also provided.
Information query
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