Invention Application
WO2013013204A3 COMPLIANT INTERCONNECT PILLARS WITH ORIENTATION OR GEOMETRY DEPENDENT ON THE POSITION ON A DIE OR FORMED WITH A PATTERNED STRUCTURE BETWEEN THE PILLAR AND A DIE PAD FOR REDUCTION OF THERMAL STRESS 审中-公开
依靠立方或几何关系的连接或几何依赖于在用于减少热应力的支柱和用于衬垫之间的图案结构形成的位置上的位置或几何

COMPLIANT INTERCONNECT PILLARS WITH ORIENTATION OR GEOMETRY DEPENDENT ON THE POSITION ON A DIE OR FORMED WITH A PATTERNED STRUCTURE BETWEEN THE PILLAR AND A DIE PAD FOR REDUCTION OF THERMAL STRESS
Abstract:
Pillars (300, 306, 502) having a directed compliance geometry are arranged to couple a semiconductor die (400, 500) to a substrate. The direction of maximum compliance of each pillar (300, 306, 502) may be aligned with the direction of maximum stress caused by unequal thermal expansion and contraction of the semiconductor die (400, 500) and the substrate. Pillars (300, 306, 502) may be designed and constructed with various shapes having particular compliance characteristics and particular directions (302, 304, 308, 310, 504) of maximum compliance. The shape and orientation of the pillars (300, 306, 502) may be selected as a function of their location on a die (400, 500) to accommodate the direction and magnitude of stress at their location. Pillars (610) may also be fabricated with particular shapes by patterning a material (604) such as a passivation material on a pad on a die (600) to increase the surface area upon which the pillar (610) is plated or deposited.
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