Invention Application
WO2013028977A2 APPARATUS AND METHOD FOR THE EVAPORATION AND DEPOSITION OF MATERIALS
审中-公开
用于材料蒸发和沉积的装置和方法
- Patent Title: APPARATUS AND METHOD FOR THE EVAPORATION AND DEPOSITION OF MATERIALS
- Patent Title (中): 用于材料蒸发和沉积的装置和方法
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Application No.: PCT/US2012/052281Application Date: 2012-08-24
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Publication No.: WO2013028977A2Publication Date: 2013-02-28
- Inventor: CHOQUETTE, Robert , EGLE, Lawrence , DICKEY, Aaron
- Applicant: MUSTANG VACUUM SYSTEMS, INC. , CHOQUETTE, Robert , EGLE, Lawrence , DICKEY, Aaron
- Applicant Address: 7135 16th Street E. Sarasota, FL 34243 US
- Assignee: MUSTANG VACUUM SYSTEMS, INC.,CHOQUETTE, Robert,EGLE, Lawrence,DICKEY, Aaron
- Current Assignee: MUSTANG VACUUM SYSTEMS, INC.,CHOQUETTE, Robert,EGLE, Lawrence,DICKEY, Aaron
- Current Assignee Address: 7135 16th Street E. Sarasota, FL 34243 US
- Agency: LEAHU, Stephen, J.
- Priority: US61/541,565 20110930; US61/526,742 20110824
- Main IPC: C23C14/24
- IPC: C23C14/24
Abstract:
An apparatus and method for the evaporation and deposition of materials onto a substrate. A material hopper assembly may receive source material. An agitator mechanism may be controlled for urging or advancing forward the source material. A grinding mechanism may be controlled for grinding source material. A heating pot vessel may be heated to evaporate the source material. The evaporated source material may be deposited on a proximate substrate. The rate of the deposition may be controlled in part by the agitator mechanism and/or the grinding mechanism. Temperature zones in a heating pot vessel may be independently controlled to evaporate the source material. A reactor chamber may be heated to allow the evaporated source materials to interact. A heated mesh may be charged to accelerate particles of the evaporated source materials onto the substrate.
Information query
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