Invention Application
- Patent Title: TUNGSTEN GATES FOR NON-PLANAR TRANSISTORS
- Patent Title (中): 非平面晶体管的TUNGSTEN GATES
-
Application No.: PCT/US2011/054294Application Date: 2011-09-30
-
Publication No.: WO2013048449A1Publication Date: 2013-04-04
- Inventor: PRADHAN, Sameer S. , BERGSTROM, Daniel, B. , CHUN, Jin-Sung , CHIU, Julia
- Applicant: INTEL CORPORATION , PRADHAN, Sameer S. , BERGSTROM, Daniel, B. , CHUN, Jin-Sung , CHIU, Julia
- Applicant Address: 2200 Mission College Boulevard Santa Clara, California 95052 US
- Assignee: INTEL CORPORATION,PRADHAN, Sameer S.,BERGSTROM, Daniel, B.,CHUN, Jin-Sung,CHIU, Julia
- Current Assignee: INTEL CORPORATION,PRADHAN, Sameer S.,BERGSTROM, Daniel, B.,CHUN, Jin-Sung,CHIU, Julia
- Current Assignee Address: 2200 Mission College Boulevard Santa Clara, California 95052 US
- Agency: WINKLE, Robert, G. et al.
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L21/336
Abstract:
The present description relates to the field of fabricating microelectronic devices having non-planar transistors. Embodiments of the present description relate to the formation of gates within non-planar NMOS transistors, wherein an NMOS work-function material, such as a composition of aluminum, titanium, and carbon, may be used in conjunction with a titanium-containing gate fill barrier to facilitate the use of a tungsten-containing conductive material in the formation of a gate electrode of the non-planar NMOS transistor gate.
Information query
IPC分类: