Invention Application
WO2013113480A1 PROJECTION EXPOSURE APPARATUS COMPRISING A MEASURING SYSTEM FOR MEASURING AN OPTICAL ELEMENT
审中-公开
包含用于测量光学元件的测量系统的投影曝光装置
- Patent Title: PROJECTION EXPOSURE APPARATUS COMPRISING A MEASURING SYSTEM FOR MEASURING AN OPTICAL ELEMENT
- Patent Title (中): 包含用于测量光学元件的测量系统的投影曝光装置
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Application No.: PCT/EP2013/000200Application Date: 2013-01-23
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Publication No.: WO2013113480A1Publication Date: 2013-08-08
- Inventor: BLEIDISTEL, Sascha , HARTJES, Joachim , GRUNER, Toralf
- Applicant: CARL ZEISS SMT GMBH
- Applicant Address: Rudolf-Eber-Strasse 2 73447 Oberkochen DE
- Assignee: CARL ZEISS SMT GMBH
- Current Assignee: CARL ZEISS SMT GMBH
- Current Assignee Address: Rudolf-Eber-Strasse 2 73447 Oberkochen DE
- Agency: SUMMERER, Christian et al.
- Priority: DE10 20120201; US61/593,349 20120201
- Main IPC: G02B27/00
- IPC: G02B27/00 ; G01N21/41 ; G03F7/20
Abstract:
A projection exposure apparatus (10) for microlithography comprises a measuring system (50) for measuring an optical element of the projection exposure apparatus. The measuring system (50) comprises: an irradiation device (54), which is configured to radiate measuring radiation (62) in different directions (64) onto the optical element (20), such that the measuring radiation (62) covers a respective optical path length (68) within the optical element (20) for the different directions (64) of incidence, a detection device (56), which is configured to measure, for the respective direction (64) of incidence, the corresponding optical path length covered by the measuring radiation (62) in the optical element (20), and an evaluation device, which is configured to determine a spatially resolved distribution of the refractive index in the optical element (20) by computed-tomographic back projection of the measured path lengths taking account of the respective direction of incidence.
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