Invention Application
WO2013139403A1 ELECTROMAGNETIC RADIATION MICRO DEVICE, WAFER ELEMENT AND METHOD FOR MANUFACTURING SUCH A MICRO DEVICE
审中-公开
电磁辐射微型器件，波形元件和制造这种微型器件的方法
- Patent Title: ELECTROMAGNETIC RADIATION MICRO DEVICE, WAFER ELEMENT AND METHOD FOR MANUFACTURING SUCH A MICRO DEVICE
- Patent Title (中): 电磁辐射微型器件，波形元件和制造这种微型器件的方法
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Application No.: PCT/EP2012/055249Application Date: 2012-03-23
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Publication No.: WO2013139403A1Publication Date: 2013-09-26
- Inventor: REINERT, Wolfgang
- Applicant: FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V. , REINERT, Wolfgang
- Applicant Address: Hansastrasse 27c 80686 Muenchen DE
- Assignee: FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.,REINERT, Wolfgang
- Current Assignee: FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.,REINERT, Wolfgang
- Current Assignee Address: Hansastrasse 27c 80686 Muenchen DE
- Agency: LEONHARD & PARTNER PATENTANWÄLTE et al.
- Main IPC: G01J5/20
- IPC: G01J5/20 ; G01J5/04 ; G01J5/02 ; G01J5/08 ; G01J5/28
Abstract:
The invention refers to an electromagnetic radiation sensor micro device for detecting electromagnetic radiation, which device comprises a substrate and a cover at least in part consisting of an electromagnetic radiation transparent material, and comprising a reflection reducing coating and providing a hermetic sealed cavity and an electromagnetic radiation detecting unit arranged within the cavity. The reflection reducing coating is arranged in form of a multi‐layer thin film stack, which comprises a first layer and a second layer arranged one upon the other. The first layer has a first refractive index and the second layer has a second refractive index different from the one of said first layer. First and second layer are of such layer thickness that for a certain wavelength there is destructive interference. The invention also refers to a wafer element as well as method for manufacturing such a device.
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