Invention Application
WO2014093243A1 MICRO PICK UP ARRAY WITH INTEGRATED PIVOT MOUNT 审中-公开
微型拾取阵列与集成的装置

MICRO PICK UP ARRAY WITH INTEGRATED PIVOT MOUNT
Abstract:
Systems and methods for transferring a micro device from a carrier substrate are disclosed. In an embodiment, a micro pick up array structure allows the micro pick up array to automatically align with the carrier substrate. Deflection of the micro pick up array may be detected to control further movement of the micro pick up array.
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