Invention Application
WO2015026824A1 METHODS AND SYSTEMS FOR FABRICATING PLATELETS OF A MONOCHROMATOR FOR X-RAY PHOTOELECTRON SPECTROSCOPY
审中-公开
用于制备X射线光电子能谱分光光度计板的方法和系统
- Patent Title: METHODS AND SYSTEMS FOR FABRICATING PLATELETS OF A MONOCHROMATOR FOR X-RAY PHOTOELECTRON SPECTROSCOPY
- Patent Title (中): 用于制备X射线光电子能谱分光光度计板的方法和系统
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Application No.: PCT/US2014/051688Application Date: 2014-08-19
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Publication No.: WO2015026824A1Publication Date: 2015-02-26
- Inventor: FANTON, Jeffrey T. , SMEDT, Rodney , SCHUELER, Bruno W. , REED, David A.
- Applicant: REVERA INCORPORATED
- Applicant Address: 3090 Oakmead Village Drive Santa Clara, California 95051 US
- Assignee: REVERA INCORPORATED
- Current Assignee: REVERA INCORPORATED
- Current Assignee Address: 3090 Oakmead Village Drive Santa Clara, California 95051 US
- Agency: BERNADICOU, Michael A. et al.
- Priority: US13/975,035 20130823
- Main IPC: G01N23/22
- IPC: G01N23/22 ; G01N23/227 ; H01J49/48 ; H01J37/256
Abstract:
Methods and systems for fabricating platelets of a monochromator for X-ray photoelectron spectroscopy (XPS) are disclosed. For example, a method of fabricating a platelet of a monochromator for X-ray photoelectron spectroscopy involves placing a crystal on a stage of an X-ray measuring apparatus, the crystal having a top surface. The method also involves measuring, by X-ray reflection, an orientation of a crystal plane of the crystal, the crystal plane beneath the top surface of the crystal and having a primary axis. The method also involves measuring a surface angle of the top surface of the crystal by measuring a light beam reflected from the top surface of the crystal.
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