公开(公告)号：WO2015112444A1

公开(公告)日：2015-07-30

申请号：PCT/US2015/011753

申请日：2015-01-16

Applicant: REVERA, INCORPORATED

Inventor： POIS, Heath A. ,  REED, David A. ,  SCHUELER, Bruno W. ,  SMEDT, Rodney ,  FANTON, Jeffrey T.

IPC: G01B15/00 ,  G01N23/223 ,  H01L21/66

CPC classification number: G01N23/201 ,  G01N2223/054 ,  H01L22/12

Abstract: Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS) are disclosed. For example, a method of measuring a sample by X-ray reflectance scatterometry involves impinging an incident X-ray beam on a sample having a periodic structure to generate a scattered X-ray beam, the incident X-ray beam simultaneously providing a plurality of incident angles and a plurality of azimuthal angles. The method also involves collecting at least a portion of the scattered X-ray beam.

Abstract translation: 公开了使用多角度X射线反射散射法（XRS）测量周期性结构的方法和系统。 例如，通过X射线反射散射测定样品的方法包括将入射的X射线束照射在具有周期性结构的样品上以产生散射的X射线束，入射的X射线束同时提供多个 入射角和多个方位角。 该方法还涉及收集散射的X射线束的至少一部分。

公开(公告)号：WO2015026824A1

公开(公告)日：2015-02-26

申请号：PCT/US2014/051688

申请日：2014-08-19

Applicant: REVERA INCORPORATED

Inventor： FANTON, Jeffrey T. ,  SMEDT, Rodney ,  SCHUELER, Bruno W. ,  REED, David A.

IPC: G01N23/22 ,  G01N23/227 ,  H01J49/48 ,  H01J37/256

CPC classification number: G01N23/20 ,  B23Q17/20 ,  G01N23/2273 ,  G21K1/06 ,  G21K2201/064 ,  H01J37/256 ,  Y10T29/49764 ,  Y10T29/49769 ,  Y10T29/49771 ,  Y10T29/53022

Abstract: Methods and systems for fabricating platelets of a monochromator for X-ray photoelectron spectroscopy (XPS) are disclosed. For example, a method of fabricating a platelet of a monochromator for X-ray photoelectron spectroscopy involves placing a crystal on a stage of an X-ray measuring apparatus, the crystal having a top surface. The method also involves measuring, by X-ray reflection, an orientation of a crystal plane of the crystal, the crystal plane beneath the top surface of the crystal and having a primary axis. The method also involves measuring a surface angle of the top surface of the crystal by measuring a light beam reflected from the top surface of the crystal.

Abstract translation: 公开了用于制造用于X射线光电子能谱（XPS）的单色仪的血小板的方法和系统。 例如，制造用于X射线光电子能谱的单色仪的血小板的方法包括将晶体放置在X射线测量装置的台上，该晶体具有顶面。 该方法还包括通过X射线反射测量晶体的晶面的取向，晶体的顶表面下方的晶面并具有主轴。 该方法还包括通过测量从晶体顶表面反射的光束来测量晶体顶表面的表面角度。