Invention Application
WO2016003758A1 FREQUENCY TUNING FOR PULSED RADIO FREQUENCY PLASMA PROCESSING 审中-公开
用于脉冲无线电频率等离子体处理的频率调谐

FREQUENCY TUNING FOR PULSED RADIO FREQUENCY PLASMA PROCESSING
Abstract:
This disclosure describes systems, methods, and apparatus for pulsed RF power delivery to a plasma load for plasma processing of a substrate. In order to maximize power delivery, a calibration phase using a dummy substrate or no substrate in the chamber, is used to ascertain a preferred fixed initial RF frequency for each pulse. This fixed initial RF frequency is then used at the start of each pulse during a processing phase, where a real substrate is used and processed in the chamber.
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