Invention Application
WO2016003758A1 FREQUENCY TUNING FOR PULSED RADIO FREQUENCY PLASMA PROCESSING
审中-公开
用于脉冲无线电频率等离子体处理的频率调谐
- Patent Title: FREQUENCY TUNING FOR PULSED RADIO FREQUENCY PLASMA PROCESSING
- Patent Title (中): 用于脉冲无线电频率等离子体处理的频率调谐
-
Application No.: PCT/US2015/037607Application Date: 2015-06-25
-
Publication No.: WO2016003758A1Publication Date: 2016-01-07
- Inventor: MUELLER, Michael , CHOI, Sam
- Applicant: ADVANCED ENERGY INDUSTRIES, INC.
- Applicant Address: 1625 Sharp Point Drive Fort Collins, CO 80525 US
- Assignee: ADVANCED ENERGY INDUSTRIES, INC.
- Current Assignee: ADVANCED ENERGY INDUSTRIES, INC.
- Current Assignee Address: 1625 Sharp Point Drive Fort Collins, CO 80525 US
- Agency: O'DOWD, Sean, R.
- Priority: US14/320,268 20140630
- Main IPC: H05H1/46
- IPC: H05H1/46 ; H03B28/00
Abstract:
This disclosure describes systems, methods, and apparatus for pulsed RF power delivery to a plasma load for plasma processing of a substrate. In order to maximize power delivery, a calibration phase using a dummy substrate or no substrate in the chamber, is used to ascertain a preferred fixed initial RF frequency for each pulse. This fixed initial RF frequency is then used at the start of each pulse during a processing phase, where a real substrate is used and processed in the chamber.
Information query
IPC分类: