Systems and methods for largescale nanotemplate and nanowire fabrication are provided. The system can include a sample holder and one or more chemical containers fluidly connected to the sample holder. The sample holder can be configured to contain a solution and to releasably hold a substrate material within the solution. In other aspects, the system can include a robotic arm including a head configured to releasably hold a substrate material. The methods can include initiating a treatment step by moving a chemical solution from a chemical container to the sample holder to submerge the substrate material for a period of time. The methods can include moving the robotic arm to position the substrate in a chemical container. The treatment steps can be stopped by removing the chemical solution from the sample holder or by moving the robotic arm to remove the substrate from the chemical container. The treatment steps can include degreasing, polishing, rinsing, anodization, and deposition.