Invention Application
WO2016057551A1 MOBILE CONNECTIVITY AND CONTROL OF SEMICONDUCTOR MANUFACTURING EQUIPMENT
审中-公开
半导体制造设备的移动连接和控制
- Patent Title: MOBILE CONNECTIVITY AND CONTROL OF SEMICONDUCTOR MANUFACTURING EQUIPMENT
- Patent Title (中): 半导体制造设备的移动连接和控制
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Application No.: PCT/US2015/054290Application Date: 2015-10-06
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Publication No.: WO2016057551A1Publication Date: 2016-04-14
- Inventor: PATRICK, Roger , HUANG, Chung Ho , GOSSELIN, Simon , WONG, Vincent , RAMNARINE, Ronald , NEWTON, Neal K. , SHAH, Mukesh , HOVERSTEN, Kerwin , AHRENS, Bob , MORA, Marco
- Applicant: LAM RESEARCH CORPORATION
- Applicant Address: 4650 Cushing Parkway Fremont, California 94538 US
- Assignee: LAM RESEARCH CORPORATION
- Current Assignee: LAM RESEARCH CORPORATION
- Current Assignee Address: 4650 Cushing Parkway Fremont, California 94538 US
- Agency: AUSTIN, James E. et al.
- Priority: US62/062,763 20141010
- Main IPC: G05B19/409
- IPC: G05B19/409
Abstract:
Integration of semiconductor tool maintenance operations on mobile devices to allow technicians to more accurately perform semiconductor tool maintenance and to allow more accurate analysis of data to improve maintenance procedures to be more repeatable, consistent, and efficient. Remote control of maintenance operations for the semiconductor tool via a portable electronic device decreases the time required to service semiconductor tools and thus increase throughput.
Information query
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