公开(公告)号：WO2021225774A1

公开(公告)日：2021-11-11

申请号：PCT/US2021/028028

申请日：2021-04-19

Applicant: LAM RESEARCH CORPORATION

Inventor： BAYATI, Reza

IPC: H01L21/02 ,  C23C16/40 ,  C23C16/50 ,  C23C16/56 ,  H01L27/11556 ,  H01L27/11582

Abstract: Films that can be useful in large area gap fill applications, such as in the formation of advanced 3D NAND devices, involve processing a semiconductor substrate by depositing on a patterned semiconductor substrate a doped silicon oxide film a doped silicon oxide film configured to expand upon annealing at a temperature above the films glass transition temperature, and annealing the doped silicon oxide film to a temperature above the film glass transition temperature. In some embodiments, reflow of the film may occur. The composition and processing conditions of the doped silicon oxide film may be tailored so that the film exhibits substantially zero as-deposited stress and substantially zero stress shift post-anneal.

公开(公告)号：WO2019190781A1

公开(公告)日：2019-10-03

申请号：PCT/US2019/022520

申请日：2019-03-15

Applicant: LAM RESEARCH CORPORATION

Inventor： YANG, Wenbing ,  MUKHERJEE, Tamal ,  BROURI, Mohand ,  TAN, Samantha ,  PAN, Yang ,  KANARIK, Keren Jacobs

IPC: H01L21/3213 ,  H01L21/3065 ,  H01L21/67 ,  H01L21/311

Abstract: Etching a refractory metal or other high surface binding energy material on a substrate can maintain or increase the smoothness of the metal/high EO surface, in some cases produce extreme smoothing. A substrate having an exposed refractory metal/high EO surface is provided. The refractory metal/high EO surface is exposed to a modification gas to modify the surface and form a modified refractory metal/high EO surface. The modified refractory metal/high EO surface is exposed to an energetic particle to preferentially remove the modified refractory metal/high EO surface relative to an underlying unmodified refractory metal/high EO surface such that the exposed refractory metal/high EO surface after removing the modified refractory metal/high EO surface is as smooth or smoother than the substrate surface before exposing the substrate surface to the modification gas.

公开(公告)号：WO2018075225A1

公开(公告)日：2018-04-26

申请号：PCT/US2017/054485

申请日：2017-09-29

Applicant: LAM RESEARCH CORPORATION

Inventor： LEE, William T. ,  VAN SCHRAVENDIJK, Bart J. ,  SMITH, David Charles ,  DANEK, Michael ,  VAN CLEEMPUT, Patrick A. ,  CHANDRASEKHARAN, Ramesh

IPC: H01L21/02 ,  H01L21/67

CPC classification number: H01L21/28202 ,  G02F1/133502 ,  H01J37/3244 ,  H01J37/32788 ,  H01L21/02164 ,  H01L21/02175 ,  H01L21/022 ,  H01L21/02211 ,  H01L21/02274 ,  H01L21/0228 ,  H01L21/28211 ,  H01L29/513

Abstract: Efficient integrated sequential deposition of alternating layers of dielectric and conductor, for example oxide/metal or metal nitride, e.g., SiO 2 /TiN, in a single tool, and even in a single process chamber enhances throughput without compromising quality when directly depositing a OMOM stack with many layers. Conductor and dielectric film deposition of a stack of at least 20 conductor/dielectric film pairs in the same processing tool or chamber, without breaking vacuum between the film depositions, such that there is no substantial cross-contamination between the conductor and dielectric film depositions, can be achieved.

Abstract translation: 在单个工具中有效集成顺序沉积电介质和导体（例如氧化物/金属或金属氮化物，例如SiO 2 / TiN）的交替层，并且甚至 在单个处理室中直接沉积具有多层的OMOM堆栈时增强了吞吐量，而不会影响质量。 在同一处理工具或腔室中导体和电介质膜沉积至少20个导体/电介质膜对的堆叠，而不破坏膜沉积之间的真空，使得在导体和电介质膜沉积之间不存在实质的交叉污染， 可以实现。

公开(公告)号：WO2016089897A1

公开(公告)日：2016-06-09

申请号：PCT/US2015/063231

申请日：2015-12-01

Applicant: POLYPLUS BATTERY COMPANY

Inventor： VISCO, Steven J. ,  NIMON, Yevgeniy S. ,  DE JONGHE, Lutgard C. ,  KATZ, Bruce D. ,  NIMON, Vitaliy

IPC: H01M10/0562 ,  H01M10/052 ,  H01M2/16

CPC classification number: H01M10/0562 ,  C03B17/06 ,  C03B17/064 ,  C03B17/067 ,  C03B23/037 ,  C03B23/245 ,  C03B33/0235 ,  C03C3/19 ,  C03C3/321 ,  C03C4/18 ,  H01M10/0525 ,  H01M2300/0068

Abstract: A standalone lithium ion-conductive solid electrolyte including a freestanding inorganic vitreous sheet of sulfide-based lithium ion conducting glass is capable of high performance in a lithium metal battery by providing a high degree of lithium ion conductivity while being highly resistant to the initiation and/or propagation of lithium dendrites. Such an electrolyte is also itself manufacturable, and readily adaptable for battery cell and cell component manufacture, in a cost-effective, scalable manner.

Abstract translation: 包含硫化物系锂离子传导性玻璃的独立无机玻璃片的独立的锂离子传导性固体电解质通过提供高度的锂离子传导性而能够在锂金属电池中具有高性能，同时对起始和/ 或锂枝晶的繁殖。 这种电解质本身也是可制造的，并且以成本有效的，可扩展的方式容易地适用于电池单元和电池组件制造。

公开(公告)号：WO2012087620A2

公开(公告)日：2012-06-28

申请号：PCT/US2011/064246

申请日：2011-12-09

Applicant: NOVELLUS SYSTEMS, INC. ,  VARADARAJAN, Bhadri N. ,  MCLAUGHLIN, Kevin M. ,  VAN SCHRAVENDIJK, Bart

Inventor： VARADARAJAN, Bhadri N. ,  MCLAUGHLIN, Kevin M. ,  VAN SCHRAVENDIJK, Bart

IPC: A61K47/34

CPC classification number: H01L21/3105 ,  H01L21/67115 ,  H01L21/76813 ,  H01L21/76814 ,  H01L21/76825

Abstract: A method for the ultraviolet (UV) treatment of carbon-containing low-k dielectric and associated apparatus enables process induced damage repair. The methods of the invention are particularly applicable in the context of damascene processing to recover lost low-k property of a dielectric damaged during processing, either pre-metallization, post-planarization, or both. UV treatments can include an exposure of the subject low-k dielectric to a constrained UV spectral profile and/or chemical silylating agent, or both.

Abstract translation: 一种用于含碳低k电介质和相关设备的紫外（UV）处理方法使得能够进行过程诱导的损伤修复。 本发明的方法特别适用于在加工期间损坏的电介质，预金属化，后平面化或两者中损耗的损耗的低k特性的镶嵌加工的背景。 紫外线治疗可以包括受试者低k电介质暴露于约束的紫外光谱分布和/或化学甲硅烷基化试剂，或两者。

公开(公告)号：WO2010056803A2

公开(公告)日：2010-05-20

申请号：PCT/US2009/064125

申请日：2009-11-12

Applicant: MIASOLE ,  CORNEILLE, Jason, S. ,  LAIA, Joseph ,  PARKER, Magdalena, M. ,  HINZE, Brett, A. ,  KRAJEWSKI, Todd, A. ,  FROIMOVITCH, Adam, B., P. ,  CROFT, Steven, T. ,  HACHTMANN, Bruce ,  BIRTWHISTLE, Darin, S.

Inventor： CORNEILLE, Jason, S. ,  LAIA, Joseph ,  PARKER, Magdalena, M. ,  HINZE, Brett, A. ,  KRAJEWSKI, Todd, A. ,  FROIMOVITCH, Adam, B., P. ,  CROFT, Steven, T. ,  HACHTMANN, Bruce ,  BIRTWHISTLE, Darin, S.

IPC: H01L31/042

CPC classification number: H01L31/022425 ,  H01C7/027 ,  H01L31/022483 ,  H01L31/0512 ,  Y02E10/50

Abstract: A power-loss-inhibiting current-collector. The power-loss-inhibiting current-collector includes a trace for collecting current from a solar cell. The power-loss-inhibiting current-collector further includes a current-limiting portion of the power-loss-inhibiting current-collector. The current-limiting portion of the power-loss-inhibiting current-collector is coupled to the trace. The current-limiting portion of the power-loss-inhibiting current-collector is configured to regulate current flow through the power-loss-inhibiting current-collector.

Abstract translation: 一种功率损耗抑制集电器。 功率损耗抑制集电器包括用于收集来自太阳能电池的电流的痕迹。 功率损耗抑制集电体还包括功率损耗抑制集电体的限流部。 功率损耗抑制集电器的限流部分与迹线耦合。 功率损失抑制集电体的限流部被配置为调节通过功率损耗抑制集电体的电流。

公开(公告)号：WO2010011858A2

公开(公告)日：2010-01-28

申请号：PCT/US2009/051574

申请日：2009-07-23

Applicant: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA ,  MAO, Samuel, S.

Inventor： MAO, Samuel, S.

IPC: H01L33/24

CPC classification number: H01L33/18 ,  B82Y20/00

Abstract: Structured LED devices and component structures with improved efficiency and reduced defects are enabled by the use of micro- or nano-structured features that reduce lattice strain and improve p-doping in inorganic LEDs, and facilitate carrier injection and recombination of OLEDs. The nanostructures can also confine current flow and provide internal light guiding to enhance efficiency and thereby improve device performance.

Abstract translation: 通过使用微结构特征或纳米结构特征来减少晶格应变并改善无机LED中的p掺杂并促进载流子注入，从而实现具有改进的效率和减少的缺陷的结构化LED器件和组件结构 和OLED的重组。 纳米结构还可以限制电流并提供内部光导，以提高效率，从而提高器件性能。

公开(公告)号：WO2010005686A2

公开(公告)日：2010-01-14

申请号：PCT/US2009/047278

申请日：2009-06-12

Applicant: POLYPLUS BATTERY COMPANY ,  VISCO, Steven, J. ,  DE JONGHE, Lutgard, C. ,  NIMON, Yevgeniy, S. ,  PETROV, Alexei ,  PRIDATKO, Kirill

Inventor： VISCO, Steven, J. ,  DE JONGHE, Lutgard, C. ,  NIMON, Yevgeniy, S. ,  PETROV, Alexei ,  PRIDATKO, Kirill

IPC: H01M12/06 ,  H01M4/02

CPC classification number: H01M2/1673 ,  H01M4/382 ,  H01M6/04 ,  H01M6/045 ,  H01M8/08 ,  H01M12/02 ,  H01M12/04 ,  H01M12/06 ,  Y10T29/49108

Abstract: Li/air battery cells are configurable to achieve very high energy density. The cells include a protected a lithium metal or alloy anode and an aqueous catholyte in a cathode compartment. In addition to the aqueous catholyte, components of the cathode compartment include an air cathode (e.g., oxygen electrode) and a variety of other possible elements.

Abstract translation: Li /空气电池单元可配置为实现非常高的能量密度。 电池包括在阴极室中的受保护的锂金属或合金阳极和含水阴极电解液。 除了水性阴极电解液之外，阴极室的部件还包括空气阴极（例如氧气电极）和各种其它可能的元件。

公开(公告)号：WO2009014775A2

公开(公告)日：2009-01-29

申请号：PCT/US2008/060362

申请日：2008-04-15

Applicant: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA ,  TUCKER, Michael, C. ,  LAU, Grace, Y. ,  JACOBSON, Craig, P.

Inventor： TUCKER, Michael, C. ,  LAU, Grace, Y. ,  JACOBSON, Craig, P.

IPC: H01M8/12

CPC classification number: H01M8/0232 ,  H01M4/8657 ,  H01M4/8889 ,  H01M8/124 ,  H01M8/1246 ,  Y02E60/525 ,  Y02P70/56

Abstract: Layered structures and associated fabrication methods that serve as the foundation for preparing high-operating-temperature electrochemical cells have a porous ceramic layer and a porous metal support or current collector layer bonded by mechanical interlocking which is provided by interpenetration of the layers and/or roughness of the metal surface. The porous layers can be infiltrated with catalytic material to produce a functioning electrochemical electrode.

Abstract translation: 作为制备高工作温度电化学电池的基础的分层结构和相关的制造方法具有多孔陶瓷层和通过机械互锁结合的多孔金属支撑件或集电器层，其通过层间和/或粗糙度相互提供而提供 的金属表面。 多孔层可以用催化材料渗透以产生功能化的电化学电极。

公开(公告)号：WO2007062220A2

公开(公告)日：2007-05-31

申请号：PCT/US2006/045407

申请日：2006-11-22

Applicant: POLYPLUS BATTERY COMPANY ,  VISCO, Steven, J. ,  NIMON, Yevgeniy, S.

Inventor： VISCO, Steven, J. ,  NIMON, Yevgeniy, S.

IPC: H01M2/16 ,  H01M2/18 ,  H01M12/06

CPC classification number: H01M12/06 ,  H01M2/1646 ,  H01M2/1673 ,  H01M4/134 ,  H01M4/381 ,  H01M4/382 ,  H01M6/16 ,  H01M6/164 ,  H01M6/185 ,  H01M6/187 ,  H01M6/22 ,  H01M10/052 ,  H01M10/0562 ,  H01M10/0565 ,  H01M12/08 ,  H01M2300/0025 ,  H01M2300/0068 ,  H01M2300/0071 ,  H01M2300/0085 ,  H01M2300/0094 ,  Y02E60/128

Abstract: Non-aqueous alkali metal (e.g., Li)/oxygen battery cells constructed with a protected anode that minimizes anode degradation and maximizes cathode performance by enabling the use of cathode performance enhancing solvents in the catholyte have negligible self-discharge and high deliverable capacity. In particular, protected lithium-oxygen batteries with non-aqueous catholytes have this improved performance.

Abstract translation: 通过在阴极电解液中使用阴极性能增强溶剂而使阳极降解最小化并使阴极性能最大化的受保护阳极构建的非水碱金属（例如，Li）/氧电池单体具有可忽略的自身 - 出货量高，交付能力强。 特别是，用非水阴极电解液保护的锂 - 氧电池具有这种改进的性能。