Invention Application
WO2016127110A2 METHODS AND SYSTEMS FOR GENERATING PLASMA TO CLEAN OBJECTS 审中-公开
用于产生等离子体清洁对象的方法和系统

METHODS AND SYSTEMS FOR GENERATING PLASMA TO CLEAN OBJECTS
Abstract:
A system to generate plasma to clean at least one object, the apparatus comprising a microplate with an electrode support array comprising a plurality of matched pairs of elongated dielectric barrier members connected to a plurality of electrodes, with said dielectric barrier members of said matched pair being spaced at a pre-determined non-uniform gap, a variable time scale pulsed power source electrically coupled to said electrodes to provide electrical pulses and a plurality of electronic components to control polarity of said electrical pulses, such that said pulses produce electron streamers from opposing elongated dielectric barrier members of said plurality of matched pairs and charge on a surface of said dielectric barrier member is substantially evenly distributed.
Patent Agency Ranking
0/0