Invention Application
- Patent Title: METHODS AND SYSTEMS FOR GENERATING PLASMA TO CLEAN OBJECTS
- Patent Title (中): 用于产生等离子体清洁对象的方法和系统
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Application No.: PCT/US2016/016859Application Date: 2016-02-05
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Publication No.: WO2016127110A2Publication Date: 2016-08-11
- Inventor: HENSLEY, Paul, F. , GABRIEL, David
- Applicant: IONFIELD HOLDINGS, LLC
- Applicant Address: One Executive Drive Suite 8 Moorestown, NJ 08057 US
- Assignee: IONFIELD HOLDINGS, LLC
- Current Assignee: IONFIELD HOLDINGS, LLC
- Current Assignee Address: One Executive Drive Suite 8 Moorestown, NJ 08057 US
- Agency: MALDJIAN, John et al.
- Priority: US62/113,230 20150206
- Main IPC: H01J37/32
- IPC: H01J37/32
Abstract:
A system to generate plasma to clean at least one object, the apparatus comprising a microplate with an electrode support array comprising a plurality of matched pairs of elongated dielectric barrier members connected to a plurality of electrodes, with said dielectric barrier members of said matched pair being spaced at a pre-determined non-uniform gap, a variable time scale pulsed power source electrically coupled to said electrodes to provide electrical pulses and a plurality of electronic components to control polarity of said electrical pulses, such that said pulses produce electron streamers from opposing elongated dielectric barrier members of said plurality of matched pairs and charge on a surface of said dielectric barrier member is substantially evenly distributed.
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