Invention Application
WO2016137589A1 DEVICE ISOLATION FOR FIELD EFFECT DEVICES SHARING A FIN OR A NANOWIRE
审中-公开
用于现场效应装置的装置隔离共享一个或一个南极
- Patent Title: DEVICE ISOLATION FOR FIELD EFFECT DEVICES SHARING A FIN OR A NANOWIRE
- Patent Title (中): 用于现场效应装置的装置隔离共享一个或一个南极
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Application No.: PCT/US2016/012893Application Date: 2016-01-11
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Publication No.: WO2016137589A1Publication Date: 2016-09-01
- Inventor: MACHKAOUTSAN, Valdimir , BADAROGLU, Mustafa , XU, Jeffrey Junhao , SONG, Stanley Seungchul , YEAP, Choh Fei
- Applicant: QUALCOMM INCORPORATED
- Applicant Address: ATTN: International IP Administration 5775 Morehouse Drive San Diego, California 92121-1714 US
- Assignee: QUALCOMM INCORPORATED
- Current Assignee: QUALCOMM INCORPORATED
- Current Assignee Address: ATTN: International IP Administration 5775 Morehouse Drive San Diego, California 92121-1714 US
- Agency: LENKIN, Alan M. et al.
- Priority: US14/633,011 20150226
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L27/092 ; H01L29/66 ; H01L29/78 ; H01L29/06 ; H01L29/775 ; B82Y10/00
Abstract:
An integrated circuit (IC) device includes a first nanowire GAA active transistor (810) of a first-type (N-Type) in a first-type region. The first active transistor may have a first-type work function material (824, NWFM) and a low channel dopant concentration in an active portion. The integrated circuit also includes a second nanowire GAA active transistor (810), using the same nanowire channel as the first active transistor. The IC device furthermore includes a first isolation transistor (TIE-OFF 840) of the first-type in the first- type region, sharing the nanowires of the first and second active nanowire GAA transistors. The first isolation transistor (TIE-OFF 840) is arranged between the first and second active transistors and has a workfunction (832 PWFM) opposite to that of the active transistors on the same nanowire. Further active transistors (P-type) may be arranged using parallel nanowires and may have a second-type work function material (834).
Information query
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