Invention Application
WO2017041843A1 A TECHNIQUE FOR ILLUMINATING A SAMPLE TO BE INSPECTED BY INTERFEROMETRIC MICROSCOPY 审中-公开
用于通过干涉显微镜检查样品的技术

A TECHNIQUE FOR ILLUMINATING A SAMPLE TO BE INSPECTED BY INTERFEROMETRIC MICROSCOPY
Abstract:
A condenser lens, and an interferometric microscopy arrangement based on the condenser lens and a method based on the condenser lens are presented. The condenser lens shines a light beam from an illumination source onto a sample that is to be inspected by an interferometric microscopy device. The light beam from the illumination source has a first wavefront. The condenser lens includes a non-condensing region and a condensing region. The non-condensing region receives a first part of the light beam from the illumination source and transmits the first part towards the sample. The first part of the light beam so transmitted has the first wavefront. The condensing region receives a second part of the light beam from the illumination source and transmits the second part towards the sample. The second part of the light beam so transmitted has a second wavefront. The first wavefront is different from the second wavefront.
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