Invention Application
WO2017052698A1 COBALT-CONTAINING CONDUCTIVE LAYERS FOR CONTROL GATE ELECTRODES IN A MEMORY STRUCTURE
审中-公开
用于记忆结构中控制栅电极的含钴导电层
- Patent Title: COBALT-CONTAINING CONDUCTIVE LAYERS FOR CONTROL GATE ELECTRODES IN A MEMORY STRUCTURE
- Patent Title (中): 用于记忆结构中控制栅电极的含钴导电层
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Application No.: PCT/US2016/036578Application Date: 2016-06-09
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Publication No.: WO2017052698A1Publication Date: 2017-03-30
- Inventor: PERI, Somesh , MAKALA, Raghuveer S. , KOKA, Sateesh , SHARANGPANI, Rahul
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: Two Legacy Town Center 6900 North Dallas Parkway Plano, Texas 75024 US
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: Two Legacy Town Center 6900 North Dallas Parkway Plano, Texas 75024 US
- Agency: RADOMSKY, Leon et al.
- Priority: US14/859,710 20150921
- Main IPC: H01L27/115
- IPC: H01L27/115
Abstract:
An alternating stack of insulating layers and sacrificial material layers can be formed over a substrate. Memory stack structures and a backside trench are formed through the alternating stack. Backside recesses are formed by removing the sacrificial material layers from the backside trench selective to the insulating layers. A cobalt-containing material is deposited such that the cobalt-containing material continuously extends at least between a neighboring pair of cobalt-containing material portions in respective backside recesses. An anneal is performed at an elevated temperature to migrate vertically-extending portions of the cobalt-containing material into the backside recesses, thereby forming vertically separated cobalt-containing material portions confined within the backside recesses. Sidewalls of the insulating layers may be rounded or tapered to facilitate migration of the cobalt-containing material.
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