Invention Application
- Patent Title: MICROSCOPE SYSTEM AND METHOD OF CONTROLLING THE SAME
- Patent Title (中): 显微镜系统及其控制方法
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Application No.: PCT/JP2016/086337Application Date: 2016-12-07
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Publication No.: WO2017099111A1Publication Date: 2017-06-15
- Inventor: SAKAMOTO, Michiie , HASHIGUCHI, Akinori , MASUDA, Shinobu , SAKATA, Tsuguhide , SHIMADA, Tsutomu , ANDO, Hirotake , KATO, Kazuhiko
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: 30-2, Shimomaruko 3-chome, Ohta-ku, Tokyo 1468501 JP
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: 30-2, Shimomaruko 3-chome, Ohta-ku, Tokyo 1468501 JP
- Agency: OHTSUKA, Yasunori et al.
- Priority: JP2015-241641 20151210
- Main IPC: G02B21/24
- IPC: G02B21/24 ; G02B21/26 ; G02B21/36
Abstract:
A microscope system includes an observation optical system including an objective lens, an XY stage capable of moving an XY plane in an X-axis direction and an Y-axis direction, a first change unit configured to change a slant of the XY plane with respect to an optical axis direction of the objective lens, and a second change unit configured to change a slant of a slide placed on the XY stage with respect to the XY plane. Changing the slant of the XY plane by the first change unit is performed based on a first mark arranged on the XY plane at a position observable by the observation optical system. Changing the slant of the slide with respect to the XY plane by the second change unit is performed based on a second mark arranged on the slide.
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