Invention Application
WO2017105673A1 HOLLOW CATHODE ION SOURCE AND METHOD OF EXTRACTING AND ACCELERATING IONS 审中-公开
中空阴极离子源和提取和加速离子的方法

HOLLOW CATHODE ION SOURCE AND METHOD OF EXTRACTING AND ACCELERATING IONS
Abstract:
An ion source and a method of extracting and accelerating ions are provided. The ion source includes a chamber. The ion source further includes a first hollow cathode having a first hollow cathode cavity and a first plasma exit orifice and a second hollow cathode having a second hollow cathode cavity and a second plasma exit orifice. The first and second hollow cathodes are disposed adjacently in the chamber. The ion source further includes a first ion accelerator between and in communication with the first plasma exit orifice and the chamber. The first ion accelerator forms a first ion acceleration cavity. The ion source further includes a second ion accelerator between and in communication with the second plasma orifice and the chamber. The second ion accelerator forms a second ion acceleration cavity. The first hollow cathode and the second hollow cathode are configured to alternatively function as electrode and counterelectrode to generate a plasma.
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