Invention Application
WO2017105673A1 HOLLOW CATHODE ION SOURCE AND METHOD OF EXTRACTING AND ACCELERATING IONS
审中-公开
中空阴极离子源和提取和加速离子的方法
- Patent Title: HOLLOW CATHODE ION SOURCE AND METHOD OF EXTRACTING AND ACCELERATING IONS
- Patent Title (中): 中空阴极离子源和提取和加速离子的方法
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Application No.: PCT/US2016/060979Application Date: 2016-11-08
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Publication No.: WO2017105673A1Publication Date: 2017-06-22
- Inventor: CHAMBERS, John , MASCHWITZ, Peter
- Applicant: AGC FLAT GLASS NORTH AMERICA, INC. , ASAHI GLASS CO., LTD. , AGC GLASS EUROPE S.A.
- Applicant Address: 11175 Cicero Drive Suite 400 Alpharetta, Georgia 30022 US
- Assignee: AGC FLAT GLASS NORTH AMERICA, INC.,ASAHI GLASS CO., LTD.,AGC GLASS EUROPE S.A.
- Current Assignee: AGC FLAT GLASS NORTH AMERICA, INC.,ASAHI GLASS CO., LTD.,AGC GLASS EUROPE S.A.
- Current Assignee Address: 11175 Cicero Drive Suite 400 Alpharetta, Georgia 30022 US
- Agency: ZOLTICK, Martin M.
- Priority: US14/975,286 20151218; US14/975,415 20151218
- Main IPC: C23C16/513
- IPC: C23C16/513 ; C23C4/134 ; H01J37/063 ; H05H1/02 ; H05H1/24 ; H05H1/54
Abstract:
An ion source and a method of extracting and accelerating ions are provided. The ion source includes a chamber. The ion source further includes a first hollow cathode having a first hollow cathode cavity and a first plasma exit orifice and a second hollow cathode having a second hollow cathode cavity and a second plasma exit orifice. The first and second hollow cathodes are disposed adjacently in the chamber. The ion source further includes a first ion accelerator between and in communication with the first plasma exit orifice and the chamber. The first ion accelerator forms a first ion acceleration cavity. The ion source further includes a second ion accelerator between and in communication with the second plasma orifice and the chamber. The second ion accelerator forms a second ion acceleration cavity. The first hollow cathode and the second hollow cathode are configured to alternatively function as electrode and counterelectrode to generate a plasma.
Information query
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