MANUFACTURING METHOD FOR A SENSING ELEMENT AND SENSOR DEVICE
Abstract:
A method for manufacturing a coil as a sensing element (12) for a sensor device (15) comprising the following steps: optional tempering of green sheets (1, 2, 3), punching holes (1a) for through-contacts, forming channels (2b) and through-contacts (2a) by means of laser, stencil printing of metallization paste (6) in the channels (2b) and holes (2a), optional laser-cleaning the residual metallization between the channels (2d) filled with metallization paste (6), aligning, stacking, drying and sintering the raw ceramic entity for creating the tile (8) comprising the sensing elements (12), and finally separating the sensing elements (12) from the tile (8). A coil (11) and a sensing element (12) manufactured by the method are furthermore provided, for manufacture of a sensor device (15) for a turbocharger (22).
Public/Granted literature
Patent Agency Ranking
0/0