Invention Application
- Patent Title: LAYER TRANSFERRED FERROELECTRIC MEMORY DEVICES
- Patent Title (中): 层转移铁电存储器件
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Application No.: PCT/US2016/025576Application Date: 2016-04-01
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Publication No.: WO2017171837A1Publication Date: 2017-10-05
- Inventor: O'BRIEN, Kevin P. , DOYLE, Brian S. , OGUZ, Kaan , KUO, Charles C. , DOCZY, Mark L. , INDUKURI, Tejaswi K.
- Applicant: INTEL CORPORATION
- Applicant Address: 2200 Mission College Blvd. Santa Clara, California 95054 US
- Assignee: INTEL CORPORATION
- Current Assignee: INTEL CORPORATION
- Current Assignee Address: 2200 Mission College Blvd. Santa Clara, California 95054 US
- Agency: HOWARD, James M.
- Main IPC: H01L43/02
- IPC: H01L43/02 ; H01L43/08 ; H01L43/10 ; H01L43/12
Abstract:
A monocrystalline metal-oxide stack including a ferroelectric (FE) tunneling layer and a buffer layer is epitaxially grown on a growth substrate. A first poly crystalline metal electrode layer is deposited over the tunneling layer. A bonding material layer is further deposited over the electrode layer. The bonding material layer is then bonded to a material layer on a front or back side of a host substrate that further comprises a transistor cell. Once bonded, the growth substrate may be removed from the metal-oxide stack to complete a transfer of the metal-oxide stack from the growth substrate to the host substrate. A second poly crystalline metal electrode layer is then deposited over the exposed buffer layer, placing both electrodes in close proximity to the FE tunneling layer.
Information query
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