发明申请
- 专利标题： A MEMS MICROPHONE, A MANUFACTURING METHOD THEREOF AND AN ELECTRONIC APPARATUS
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申请号： PCT/CN2017/087771申请日： 2017-06-09
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公开(公告)号： WO2018223389A1公开(公告)日： 2018-12-13
- 发明人: ZOU, Quanbo
- 申请人： GOERTEK. INC
- 申请人地址： No. 268 Dongfang Road, Hi-Tech Industry District Weifang, Shandong 261031 CN
- 专利权人： GOERTEK. INC
- 当前专利权人： GOERTEK. INC
- 当前专利权人地址： No. 268 Dongfang Road, Hi-Tech Industry District Weifang, Shandong 261031 CN
- 代理机构： BEYOND TALENT PATENT AGENT FIRM
- 主分类号： B81B7/02
- IPC分类号： B81B7/02 ; B81C1/00 ; H04R19/04 ; H04R31/00
摘要：
A MEMS microphone, a manufacturing method thereof and an electronic apparatus are disclosed. The MEMS microphone comprises: a MEMS microphone device including a MEMS microphone chip and a mesh membrane (402) monolithically integrated with the MEMS microphone chip; and a housing (411, 412) including an acoustic port (413), wherein the MEMS microphone device is mounted in the housing (411, 412), and the mesh membrane (402) is arranged between the MEMS microphone chip and the acoustic port (413) as a particle filter for the MEMS microphone chip. According to an embodiment, a relatively thin mesh filter can be provided to a MEMS microphone with relatively high reliability.
