In a first aspect, the present invention relates to a method for encapsulating a sensing and/or actuator device (100), comprising providing a sensing and/or actuator device (100) having a demarcation structure (400) thereon, the sensing and/or actuator device (100) comprising at least a substrate (200) and a sensing and/or actuator element (310) on the substrate (200), the demarcation structure (400) contacting the substrate (200) and defining an enclosed area (450) of the substrate (200), the enclosed area (450) comprising at least the sensing and/or actuator element (310). The method also comprises providing an encapsulation material (500) outside the enclosed area (450), such that the sensing and/or actuator element (310) is left uncovered by the encapsulation material (500). The demarcation structure (400) further comprises a capping structure (420) overlaying the sensing and/or actuator element (310).