Invention Application
- Patent Title: FIELD EFFECT TRANSISTORS HAVING FERROELECTRIC OR ANTIFERROELECTRIC GATE DIELECTRIC STRUCTURE
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Application No.: PCT/US2017/054164Application Date: 2017-09-28
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Publication No.: WO2019066875A1Publication Date: 2019-04-04
- Inventor: KIM, Seiyon , AVCI, Uygar E. , HOWARD, Joshua M. , YOUNG, Ian A. , MORRIS, Daniel H.
- Applicant: INTEL CORPORATION , KIM, Seiyon , AVCI, Uygar E. , HOWARD, Joshua M. , YOUNG, Ian A. , MORRIS, Daniel H.
- Applicant Address: 2200 Mission College Boulevard Santa Clara, California 95054 US
- Assignee: INTEL CORPORATION,KIM, Seiyon,AVCI, Uygar E.,HOWARD, Joshua M.,YOUNG, Ian A.,MORRIS, Daniel H.
- Current Assignee: INTEL CORPORATION,KIM, Seiyon,AVCI, Uygar E.,HOWARD, Joshua M.,YOUNG, Ian A.,MORRIS, Daniel H.
- Current Assignee Address: 2200 Mission College Boulevard Santa Clara, California 95054 US
- Agency: BRASK, Justin K. et al.
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/66 ; H01L29/51
Abstract:
Field effect transistors having a ferroelectric or antiferroelectric gate dielectric structure are described. In an example, an integrated circuit structure includes a semiconductor channel structure includes a monocrystalline material. A gate dielectric is over the semiconductor channel structure. The gate dielectric includes a ferroelectric or antiferroelectric polycrystalline material layer. A gate electrode has a conductive layer on the ferroelectric or antiferroelectric polycrystalline material layer, the conductive layer including a metal. A first source or drain structure is at a first side of the gate electrode. A second source or drain structure is at a second side of the gate electrode opposite the first side.
Information query
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