Invention Application
- Patent Title: DISPENSING ARM HEAD HAVING POINT OF DISPENSE RECIRCULATION MODE
-
Application No.: PCT/US2018/058894Application Date: 2018-11-02
-
Publication No.: WO2019094288A1Publication Date: 2019-05-16
- Inventor: VIT, Paul , BREINGAN, William, Gilbert , HOFMEISTER, Christopher
- Applicant: VEECO PRECISION SURFACE PROCESSING LLC
- Applicant Address: 185 Gibraltar Road Horsham, PA 19044 US
- Assignee: VEECO PRECISION SURFACE PROCESSING LLC
- Current Assignee: VEECO PRECISION SURFACE PROCESSING LLC
- Current Assignee Address: 185 Gibraltar Road Horsham, PA 19044 US
- Agency: ELLIS, Edward, J. et al.
- Priority: US62/582,679 20171107
- Main IPC: H01L21/67
- IPC: H01L21/67
Abstract:
A dispense arm device for controllably discharging a fluid onto a substrate includes a dispense head coupled to and contained within an arm portion of the dispense arm device, wherein the dispense head having a valve assembly that is configured to operate in: (1) a recirculation mode in which a dispense outlet formed in the dispense head is closed off and a recirculation path is opened for allowing heated chemistry that is delivered to the dispense head to be delivered back from the dispense head to a remote location (e.g., a recycle tank); and (2) a dispense mode in which the dispense outlet is opened to allow heated chemistry to be discharged from the dispense head and the recirculation path is closed off.
Information query
IPC分类: