Invention Application
- Patent Title: ROTATIONAL INDEXER WITH ADDITIONAL ROTATIONAL AXES
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Application No.: PCT/US2019/013000Application Date: 2019-01-10
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Publication No.: WO2019140057A1Publication Date: 2019-07-18
- Inventor: BLANK, Richard M. , LEESER, Karl F.
- Applicant: LAM RESEARCH CORPORATION
- Applicant Address: 4650 Cushing Parkway Fremont, California 94538 US
- Assignee: LAM RESEARCH CORPORATION
- Current Assignee: LAM RESEARCH CORPORATION
- Current Assignee Address: 4650 Cushing Parkway Fremont, California 94538 US
- Agency: SCHOLZ, Christian D. et al.
- Priority: US15/867,599 20180110
- Main IPC: H01L21/677
- IPC: H01L21/677 ; H01L21/68 ; H01L21/687
Abstract:
A rotational indexer is provided that may be rotated to move semiconductor wafers or other items between various stations arranged in a circular array; the items being moved may be supported by arms of the indexer during such movement. The rotational indexer may be further configured to also cause the items being moved to rotate about other rotational axes to cause rotation of the items relative to the arms supporting them.
Information query
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