Invention Application
- Patent Title: CONTROL SYSTEM AND METHOD
-
Application No.: PCT/EP2019/054340Application Date: 2019-02-21
-
Publication No.: WO2019174885A1Publication Date: 2019-09-19
- Inventor: GODFRIED, Herman, Philip , EVERTS, Frank , OP 'T ROOT, Wilhelmus, Patrick, Elisabeth, Maria
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: P.O. Box 324 5500 AH Veldhoven NL
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: P.O. Box 324 5500 AH Veldhoven NL
- Agency: KETTING, Alfred
- Priority: EP18161160.9 20180312
- Main IPC: H01S3/13
- IPC: H01S3/13 ; H01S3/134 ; G03F7/20 ; H01S3/097 ; H01S3/104
Abstract:
A control system for controlling a laser, comprising a sensor for sensing a physical value indicative of a characteristic of a laser beam emitted by the laser, a switch, a first controller and a second controller. Each controller is configured, to receive a further sensor value from the sensor, adjust a received setpoint value based on the received further sensor value to give an output value and cause the laser to operate in accordance with the output value. The switch is configured to switch between the controllers such that output values are provided from each controller in a cyclic fashion.
Information query