Invention Application
- Patent Title: REACTOR FOR APPLYING A COATING ON INTERNAL SURFACES OF COMPONENTS
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Application No.: PCT/US2019/022788Application Date: 2019-03-18
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Publication No.: WO2019182991A1Publication Date: 2019-09-26
- Inventor: MELNIK, Yuriy , CHATTERJEE, Sukti , GANGAKHEDKAR, Kaushal , FRANKEL, Jonathan , SCUDDER, Lance A. , NARWANKAR, Pravin K. , BRITZ, David Alexander , ISHIKAWA, David Masayuki
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: 3050 Bowers Avenue Santa Clara, California 95054 US
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: 3050 Bowers Avenue Santa Clara, California 95054 US
- Agency: PATTERSON, B. Todd et al.
- Priority: US62/644,645 20180319
- Main IPC: C23C16/455
- IPC: C23C16/455 ; C23C16/44 ; C23C16/04 ; C23C16/458
Abstract:
A gas distribution assembly for applying a coating on an interior of a plurality of components includes a support with a plurality of component cavities formed within the support. Each component cavity corresponds to a respective component to fluidly couple with an interior of the respective component. A first gas source flow line is fluidly coupled with each of the component cavities to provide a first gas from a first gas source to each of the component cavities, and a second gas source flow line is fluidly coupled with each of the component cavities to provide a second gas from a second gas source to each of the component cavities.
Information query
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