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    AEROSPACE COMPONENTS HAVING PROTECTIVE COATINGS AND METHODS FOR PREPARING THE SAME
    2.
    发明申请
    AEROSPACE COMPONENTS HAVING PROTECTIVE COATINGS AND METHODS FOR PREPARING THE SAME 审中-公开

    公开(公告)号：WO2022108740A1

    公开(公告)日：2022-05-27

    申请号：PCT/US2021/057514

    申请日：2021-11-01

    Applicant: APPLIED MATERIALS, INC.

    Inventor： CHATTERJEE, Sukti ,  BRITZ, David Alexander ,  SCUDDER, Lance A.

    IPC: C23C28/04 ,  C23C16/40 ,  C23C16/02 ,  C23C16/455 ,  F01D5/28

    Abstract: Embodiments of the present disclosure generally relate to protective coatings on aerospace components and methods for depositing the protective coatings. In one or more embodiments, an aerospace component containing a protective coating is provided and contains a superalloy substrate and a bond coating disposed on the superalloy substrate. The protective coating also contains a thermal barrier coating containing yttria-stabilized zirconia disposed on the bond coating, an oxide coating disposed on the thermal barrier coating, and an optional capping layer disposed on the oxide coating. The oxide coating contains a film stack containing two or more pairs of a first film and a second film, where the first film contains a first metal oxide and the second film contains a second metal oxide, and the first metal oxide has a different composition than the second metal oxide. The capping layer contains aluminum oxide, calcium oxide, magnesium oxide, or any combination thereof.

    METHODS FOR CLEANING AEROSPACE COMPONENTS
    4.
    发明申请
    METHODS FOR CLEANING AEROSPACE COMPONENTS 审中-公开

    公开(公告)号：WO2022040146A1

    公开(公告)日：2022-02-24

    申请号：PCT/US2021/046245

    申请日：2021-08-17

    Applicant: APPLIED MATERIALS, INC.

    Inventor： CHATTERJEE, Sukti ,  SCUDDER, Lance A. ,  MELNIK, Yuriy ,  OHNO, Kenichi ,  LIU, Eric H. ,  BRITZ, David Alexander

    IPC: B08B7/00 ,  B64G1/22

    Abstract: Embodiments of the present disclosure generally relate to methods for cleaning aerospace components having oxidation, corrosion, contaminants, and/or other degradations. In one or more embodiments, a cleaning method includes positioning the aerospace component into a processing region of a processing chamber, introducing hydrogen gas into the processing region, maintaining the processing region at a pressure of about 100 mTorr to about 5,000 mTorr, and heating the aerospace component at a temperature of about 500°C to about 1,200°C for about 0.5 hours to about 24 hours to produce a cleaned surface on the aerospace component. In other embodiments, a cleaning method includes exposing the aerospace component to ozone while maintaining the aerospace component at a temperature of about 15°C to about 500°C for 0.25 hours to about 24 hours to produce a cleaned surface on the aerospace component.

    HIGH SPEED EPITAXY SYSTEM AND METHODS
    8.
    发明申请
    HIGH SPEED EPITAXY SYSTEM AND METHODS 审中-公开
    高速外形系统和方法

    公开(公告)号：WO2016029161A1

    公开(公告)日：2016-02-25

    申请号：PCT/US2015/046380

    申请日：2015-08-21

    Applicant: APPLIED MATERIALS, INC.

    Inventor： BURROWS, Brian H. ,  SCUDDER, Lance A. ,  CARLSON, David K. ,  MAQSOOD, Kashif

    IPC: H01L21/20

    CPC classification number: H01L21/68785 ,  C23C14/50 ,  C23C16/4585 ,  C30B25/12 ,  H01L21/68721 ,  H01L21/68771

    Abstract: A substrate carrier for an epitaxy chamber is described that has an elongated base member supporting two substrate supports in an angled relationship and a center substrate support between the two substrate supports. The center substrate support has one or more openings at which a substrate is positioned for processing, enabling both sides of the substrate to be processed concurrently.

    Abstract translation: 描述了一种用于外延室的衬底载体，其具有以成角度关系支撑两个衬底支撑件的细长底座构件和在两个衬底支撑件之间的中心衬底支撑件。 中心基板支撑件具有一个或多个开口，在该开口处基板被定位用于处理，使得基板的两侧能够同时被处理。

    HIGH SPEED EPI SYSTEM AND CHAMBER CONCEPTS
    9.
    发明申请
    HIGH SPEED EPI SYSTEM AND CHAMBER CONCEPTS 审中-公开
    高速EPI系统和机箱概念

    公开(公告)号：WO2015112328A1

    公开(公告)日：2015-07-30

    申请号：PCT/US2015/010357

    申请日：2015-01-06

    Applicant: APPLIED MATERIALS, INC.

    Inventor： BURROWS, Brian H. ,  SCUDDER, Lance A. ,  MAQSOOD, Kashif ,  ANDERSON, Roger N. ,  ACHARYA, Sumedh Dattatraya

    IPC: H01L21/20 ,  H01L21/02

    CPC classification number: C23C16/4584 ,  C23C16/24 ,  C23C16/45502 ,  C23C16/45578 ,  C23C16/46 ,  C23C16/482 ,  H01L21/67115 ,  H01L21/6719 ,  H01L21/67757

    Abstract: Embodiments described herein generally relate to a batch processing chamber. The batch processing chamber includes a lid, a chamber wall and a bottom that define a processing region. A cassette including a stack of susceptors for supporting substrates is disposed in the processing region. The edge of the cassette is coupled to a plurality of shafts and the shafts are coupled to a rotor. During operation, the rotor rotates the cassette to improve deposition uniformity. A heating element is disposed on the chamber wall and a plurality of gas inlets is disposed through the heating element on the chamber wall. Each gas inlet is substantially perpendicular to the chamber wall.

    Abstract translation: 本文描述的实施例通常涉及批处理室。 批处理室包括盖，室壁和限定处理区域的底部。 包括用于支撑衬底的一堆基座的盒子被设置在处理区域中。 盒的边缘联接到多个轴，并且轴联接到转子。 在操作期间，转子旋转盒子以改善沉积均匀性。 加热元件设置在室壁上，并且多个气体入口通过加热元件设置在室壁上。 每个气体入口基本上垂直于室壁。

    METHODS FOR DEPOSITING SACRIFICIAL COATINGS ON AEROSPACE COMPONENTS
    10.
    发明申请
    METHODS FOR DEPOSITING SACRIFICIAL COATINGS ON AEROSPACE COMPONENTS 审中-公开

    公开(公告)号：WO2020251654A1

    公开(公告)日：2020-12-17

    申请号：PCT/US2020/027247

    申请日：2020-04-08

    Applicant: APPLIED MATERIALS, INC.

    Inventor： CHATTERJEE, Sukti ,  OHNO, Kenichi ,  SCUDDER, Lance A. ,  MELNIK, Yuriy ,  BRITZ, David A. ,  NARWANKAR, Pravin K. ,  KNISLEY, Thomas ,  SALY, Mark ,  ANTHIS, Jeffrey

    IPC: C23C10/60 ,  C23C10/30 ,  C23C28/04

    Abstract: Embodiments of the present disclosure generally relate to protective coatings on aerospace components and methods for depositing the protective coatings. In one or more embodiments, a method for producing a protective coating on an aerospace component includes depositing a metal oxide template layer on the aerospace component containing nickel and aluminum (e.g., nickel-aluminum superalloy) and heating the aerospace component containing the metal oxide template layer during a thermal process and/or an oxidation process. The thermal process and/or oxidation process includes diffusing aluminum contained within the aerospace component towards a surface of the aerospace component containing the metal oxide template layer, oxidizing the diffused aluminum to produce an aluminum oxide layer disposed between the aerospace component and the metal oxide template layer, and removing at least a portion of the metal oxide template layer while leaving the aluminum oxide layer.

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