An apparatus (100) for transportation of a carrier (10) in a vacuum chamber (210) is described. The apparatus (100) includes a first transport system (101) provided along a first transport path (T1) in a transport direction (T). The first transport system (101) includes a first lower track section (11L) and a first upper track section (11U). The first upper track section (11U) includes one or more magnetic bearings (120) having one or more first actuators (121) for contactlessly holding the carrier (10) in a carrier transportation space (15). Further, the first upper track section (11U) includes a drive unit (130) having one or more second actuators (132) for moving the carrier (10) in the transport direction (T). The one or more first actuators (121) and the one or more second actuators (132) are arranged above the carrier transportation space (15). Additionally, the apparatus (100) includes a path switch assembly (150) for moving the carrier away from the first transport path (T1) in a path switch direction (S) and an actuator (124) for modifying a distance between the first lower track section (11L) and the first upper track section (11U).