公开(公告)号：WO2023056694A1

公开(公告)日：2023-04-13

申请号：PCT/CN2021/133515

申请日：2021-11-26

Applicant: 徐立红

Inventor： 徐立红 XU, Lihong

IPC: H01L21/50 ,  B65G49/07

Abstract: 本发明公开了一种应用于电子产品生产的压紧结构及操作方法，属于电子产品生产领域。一种应用于电子产品生产的压紧结构，包括安装件，所述安装件的一侧设有压紧组件和辅助压紧机构，所述辅助压紧机构包括导向箱，所述导向箱固定安装在所述安装件的一侧，所述导向箱的内部滑动连接有气筒箱，所述气筒箱的内部固定安装有隔板，所述隔板把所述气筒箱的内部分为充气腔和机械腔；本发明通过设置导向箱、气筒箱、滑动块、辅助压紧轮和压簧等结构组件，从而使得本装置结构巧妙，可以对预封装的芯片进行压紧，且相对于现有技术中的压紧机构，本装置对芯片进行压紧时，芯片不易翘头，从而便于后续顺利封装。

公开(公告)号：WO2022107415A1

公开(公告)日：2022-05-27

申请号：PCT/JP2021/032284

申请日：2021-09-02

Applicant: 村田機械株式会社

Inventor： 小林　誠

IPC: B61B3/02 ,  B65G49/07 ,  H01L21/677

Abstract: 天井搬送車は、容器を移載する昇降台と、容器の上面に接触し、昇降台に対して高さ方向に沿って移動自在に設けられた容器接触部と、昇降台に対する容器接触部の相対的な高さ位置を検出する高さ検出部と、を備える。容器接触部は、昇降台に対して水平方向に沿って移動自在に設けられている。

公开(公告)号：WO2022104028A1

公开(公告)日：2022-05-19

申请号：PCT/US2021/059099

申请日：2021-11-12

Applicant: MASSACHUSETTS INSTITUTE OF TECHNOLOGY

Inventor： TRUMPER, David, L. ,  BHUSHAN, Brij, Mohan

IPC: B23Q3/15 ,  B65G49/07 ,  H01L21/683 ,  H01L21/687

Abstract: An electrostatic chuck includes electrodes to clamp a workpiece, electrodes to electrostatically levitate and position the workpiece, and sensors to detect position and orientation of the workpiece. Lateral motion of the workpiece relative to the electrostatic chuck can be damped prior to clamping.

公开(公告)号：WO2021016389A1

公开(公告)日：2021-01-28

申请号：PCT/US2020/043136

申请日：2020-07-22

Applicant: RORZE AUTOMATION, INC.

Inventor： CHERRY III, Royal Wallace ,  LELE, Omied, Surendra ,  GONZALEZ, Bernardo ,  CHALMELA, Rahul Janardhan ,  LI, Yinglong

IPC: H01L21/67 ,  B25J5/00 ,  B25J15/06 ,  B25J15/08 ,  B65G49/07 ,  H01L21/68

Abstract: Systems and methods to manipulate stacks of silicon wafers and rings are described. In one aspect, a robotic actuator includes a robotic end effector that further a first surface having multiple attached wafer suction cups arranged to collectively grasp a silicon wafer. The robotic end effector also includes a second surface that further includes multiple attached ring suction cups arranged to collectively grasp a ring. The second surface also includes a bulk grabber positionable to grasp a collective stack of rings. The robotic actuator also includes an axial actuator configured to rotate the robotic end effector about a flip axis, such that either the first surface or the second surface faces vertically upwards.

公开(公告)号：WO2020167947A1

公开(公告)日：2020-08-20

申请号：PCT/US2020/017925

申请日：2020-02-12

Applicant: PERSIMMON TECHNOLOGIES CORPORATION

Inventor： WILKAS, Scott

IPC: H01L21/68 ,  B25J13/08 ,  B25J19/02 ,  B65G49/07 ,  H01L21/677

Abstract: An apparatus including at least one emitter configured to emit energy; at least one receiver configured to receive the emitted energy, where the at least one emitter is mounted on at least one of: a robot arm, an end effector of the robot arm, a substrate on the robot arm, or a substrate process module, where the at least one receiver is mounted on at least one of: the robot arm, the end effector of the robot arm, the substrate on the robot arm, or the substrate process module.

公开(公告)号：WO2020001751A1

公开(公告)日：2020-01-02

申请号：PCT/EP2018/067110

申请日：2018-06-26

Applicant: APPLIED MATERIALS, INC. ,  HEIMEL, Oliver ,  EHMANN, Christian Wolfgang ,  LINDENBERG, Ralph

Inventor： HEIMEL, Oliver ,  EHMANN, Christian Wolfgang ,  LINDENBERG, Ralph

IPC: C23C14/50 ,  B65G49/07 ,  C23C14/56 ,  H01J37/32 ,  H01L21/67 ,  H01L21/677 ,  H01L21/687

Abstract: A magnetic levitation system (100) for transporting a carrier (10) in a transport direction (T) is described. The magnetic levitation system includes one or more magnetic bearings (120) having one or more first actuators (121) for contactlessly holding the carrier (10) in a carrier transportation space (15). The one or more first actuators (121) are arranged above the carrier transportation space (15). Additionally, the magnetic levitation system includes a drive unit (130) having one or more second actuators (132) for moving the carrier (10) in the transport direction (T). The one or more second actuators (132) are laterally arranged on a lower portion (15L) of the carrier transportation space (15).

公开(公告)号：WO2019241175A1

公开(公告)日：2019-12-19

申请号：PCT/US2019/036442

申请日：2019-06-11

Applicant: MIDDLESEX INDUSTRIES SA ,  HORN, George, W.

Inventor： HORN, George, W.

IPC: H01L21/677 ,  B65G49/07 ,  G05B19/418

Abstract: Asynchronous conveyor networks serving as inter-process transport mechanisms eliminate transport capacity constraints of vehicle-based systems in integrated circuit (IC) manufacturing environments. Demand variability may be buffered without the use of off- line-storage such as Stockers. The variability in wait times for transport service is also eliminated. Overall factory cycle times are thus reduced while manufacturing capacity is simultaneously increased. An autonomous conveyor network automated materials handling system combines clean frictionless conveyor principles with a unique network layout to fulfill the logistics requirements of IC manufacturing environments. Mechanical conveyor-to-tool interfaces, also referred to as equipment delivery interfaces (EDi's), bridge the conveyor network to individual tools. An operating software module integrates the functionality of the conveyor network and EDi's. The result is a full capability factory logistics system.

公开(公告)号：WO2019223871A1

公开(公告)日：2019-11-28

申请号：PCT/EP2018/063700

申请日：2018-05-24

Applicant: APPLIED MATERIALS, INC. ,  HEIMEL, Oliver ,  EHMANN, Christian Wolfgang ,  LINDENBERG, Ralph

Inventor： HEIMEL, Oliver ,  EHMANN, Christian Wolfgang ,  LINDENBERG, Ralph

IPC: C23C14/50 ,  B65G49/07 ,  C23C14/56 ,  H01J37/32 ,  H01L21/67 ,  H01L21/677

Abstract: An apparatus (100) for transportation of a carrier (10) in a vacuum chamber (210) is described. The apparatus (100) includes a first transport system (101) provided along a first transport path (T1) in a transport direction (T). The first transport system (101) includes a first lower track section (11L) and a first upper track section (11U). The first upper track section (11U) includes one or more magnetic bearings (120) having one or more first actuators (121) for contactlessly holding the carrier (10) in a carrier transportation space (15). Further, the first upper track section (11U) includes a drive unit (130) having one or more second actuators (132) for moving the carrier (10) in the transport direction (T). The one or more first actuators (121) and the one or more second actuators (132) are arranged above the carrier transportation space (15). Additionally, the apparatus (100) includes a path switch assembly (150) for moving the carrier away from the first transport path (T1) in a path switch direction (S) and an actuator (124) for modifying a distance between the first lower track section (11L) and the first upper track section (11U).

公开(公告)号：WO2019148522A1

公开(公告)日：2019-08-08

申请号：PCT/CN2018/075727

申请日：2018-02-08

Applicant: 深圳丰盛装备股份有限公司

Inventor： 王俊朝 ,  常红旺 ,  李学文 ,  李军阳

IPC: H01L21/677 ,  B65G49/07 ,  B65G47/91

Abstract: 一种管式PECVD自动上下料装置，包括悬臂结构（10）、手抓结构（20）、升降结构（30）以及相平行的两条竖向型材（40），且两条竖向型材（40）上均设置有悬臂结构（10），升降结构（30）用于驱动悬臂结构（10）在竖向型材（40）上往复运动；悬臂结构（10）包括第一悬臂（101）和第二悬臂（102），第一悬臂（101）的中部安装在竖向型材（40）上，第一悬臂（101）的下表面滑动安装有第一连接板（103），第一连接板（103）在第一悬臂（101）上往复运动；第二悬臂（102）与第一连接板（103）固定连接，第二悬臂（102）的下表面滑动安装有第二连接板（104），第二连接板（104）在第二悬臂（102）上往复运动；手抓结构（20）固定安装在第二连接板（104）上。

公开(公告)号：WO2019012967A1

公开(公告)日：2019-01-17

申请号：PCT/JP2018/023930

申请日：2018-06-25

Applicant: 株式会社荏原製作所

Inventor： 富田　正輝 ,  山川　純逸

IPC: H01L21/677 ,  B25J15/06 ,  B65G49/06 ,  B65G49/07

Abstract: 基板の保持精度が低下することを改善した基板保持装置を提供する。　ベルヌーイ吸着パッドは、基板Ｓの表面又は裏面を吸引して保持する。位置決定部５４は、基板Ｓの側面８２に接触して、基板Ｓを押すことが可能であり、吸引された基板Ｓを位置決め可能である。ピン６６は、位置決定部５４を基板Ｓの側面８２に接触させることが可能である。ピン６６によって、位置決定部５４が基板Ｓの側面８２に接触させられることにより、位置決定部５４は基板Ｓを位置決めする。