Invention Application
- Patent Title: USE OF COMPOSITIONS COMPRISING A SOLVENT MIXTURE FOR AVOIDING PATTERN COLLAPSE WHEN TREATING PATTERNED MATERIALS WITH LINE-SPACE DIMENSIONS OF 50 NM OR BELOW
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Application No.: PCT/EP2019/062178Application Date: 2019-05-13
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Publication No.: WO2019224032A1Publication Date: 2019-11-28
- Inventor: BRILL, Marcel , LOEFFLER, Daniel , PIRRUNG, Frank , ENGELBRECHT, Lothar , CSIHONY, Szilard , BERGELER, Maike , BOYKO, Volodymyr , WILKE, Patrick
- Applicant: BASF SE
- Applicant Address: Carl-Bosch-Strasse 38 67056 Ludwigshafen am Rhein DE
- Assignee: BASF SE
- Current Assignee: BASF SE
- Current Assignee Address: Carl-Bosch-Strasse 38 67056 Ludwigshafen am Rhein DE
- Agency: BASF IP ASSOCIATION
- Priority: EP18174211.5 20180525
- Main IPC: C11D7/50
- IPC: C11D7/50 ; C11D11/00 ; G03F7/40
Abstract:
The invention relates to the use of a composition comprising a C 1 to C 6 alkanol and a carboxylic acid ester of formula (I) wherein R 1 is selected from a C 1 to C 6 alkyl, which may be unsubstituted or substituted by OH or F, and -X 21 -[O-X 22 ] n -H; R 2 is selected from a C 1 to C 6 alkyl, which may be unsubstituted or substituted by OH or F, and -X 21 -[O-X 22 ] n -H; X 21 , X 22 are independently selected from C 1 to C 6 alkandiyl, which may be unsubstituted or substituted by OH or F; n is an integer from 1 to 5. wherein, the C 1 to C 6 alkanol and the carboxylic acid ester are selected so as to form an azeotropic mixture and are present in an amount from 20 % by weight below to 20 % by weight above such azeotropic mixture.
Information query
